@inproceedings{80871a09fef949af982a3797e94a45be,
title = "A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity",
abstract = "An integrated architecture for SNOM sensor is proposed. The basic design consists of a transparent cantilever with a VCSEL bonded by flip-chip beneath the metalized tip. An aperture in the metalization layer at the apex is illuminated by the VCSEL and the light beam back reflected is detected with a detector integrated on the back of the VCSEL. The study also presents excellent quality optical images, demonstrating the performance of SNOM sensor and justifying the interest of integrated architecture.",
keywords = "Apertures, Detectors, Face detection, Head, Optical feedback, Optical microscopy, Optical sensors, Optical surface waves, Threshold current, Vertical cavity surface emitting lasers",
author = "C. Gorecki and D. Heinis and Benkelfat, \{B. E.\}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 IEEE/LEOS International Conference on Optical MEMS ; Conference date: 18-08-2003 Through 21-08-2003",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/OMEMS.2003.1233467",
language = "English",
series = "2003 IEEE/LEOS International Conference on Optical MEMS",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "61--62",
booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",
}