A new way to integrate solid state nanopores for translocation experiments

E. M. Huisman; A. L. Biance; A. Madouri; G. Patriarche; E. Bourhis; G. Oukhaled; L. Auvray; J. Gierak

doi:10.1016/j.mee.2008.01.106

A new way to integrate solid state nanopores for translocation experiments

E. M. Huisman, A. L. Biance, A. Madouri, G. Patriarche, E. Bourhis, G. Oukhaled, L. Auvray, J. Gierak

Research output: Contribution to journal › Article › peer-review

Abstract

The integration of the nanopore drilled in a nanometric thin and therefore fragile membrane in a macroscopic set-up necessitates a multiscale approach. An integration technique to select and support such a nanopore is described, using a Pyrex device with a micropore. Therefore, we developed a method to fabricate micrometer sized apertures in Pyrex wafers relying on a specific control of HF etching. The integration of FIB nanodrilled membrane in this Pyrex set-up is here discussed.

Original language	English
Pages (from-to)	1311-1313
Number of pages	3
Journal	Microelectronic Engineering
Volume	85
Issue number	5-6
DOIs	https://doi.org/10.1016/j.mee.2008.01.106
Publication status	Published - 1 May 2008
Externally published	Yes

Keywords

Bioapplications
FIB
HF etching
Micro-nanofluidic
Nanopores
Pyrex

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10.1016/j.mee.2008.01.106

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title = "A new way to integrate solid state nanopores for translocation experiments",

abstract = "The integration of the nanopore drilled in a nanometric thin and therefore fragile membrane in a macroscopic set-up necessitates a multiscale approach. An integration technique to select and support such a nanopore is described, using a Pyrex device with a micropore. Therefore, we developed a method to fabricate micrometer sized apertures in Pyrex wafers relying on a specific control of HF etching. The integration of FIB nanodrilled membrane in this Pyrex set-up is here discussed.",

keywords = "Bioapplications, FIB, HF etching, Micro-nanofluidic, Nanopores, Pyrex",

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doi = "10.1016/j.mee.2008.01.106",

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T1 - A new way to integrate solid state nanopores for translocation experiments

AU - Huisman, E. M.

AU - Biance, A. L.

AU - Madouri, A.

AU - Patriarche, G.

AU - Bourhis, E.

AU - Oukhaled, G.

AU - Auvray, L.

AU - Gierak, J.

PY - 2008/5/1

Y1 - 2008/5/1

N2 - The integration of the nanopore drilled in a nanometric thin and therefore fragile membrane in a macroscopic set-up necessitates a multiscale approach. An integration technique to select and support such a nanopore is described, using a Pyrex device with a micropore. Therefore, we developed a method to fabricate micrometer sized apertures in Pyrex wafers relying on a specific control of HF etching. The integration of FIB nanodrilled membrane in this Pyrex set-up is here discussed.

AB - The integration of the nanopore drilled in a nanometric thin and therefore fragile membrane in a macroscopic set-up necessitates a multiscale approach. An integration technique to select and support such a nanopore is described, using a Pyrex device with a micropore. Therefore, we developed a method to fabricate micrometer sized apertures in Pyrex wafers relying on a specific control of HF etching. The integration of FIB nanodrilled membrane in this Pyrex set-up is here discussed.

KW - Bioapplications

KW - FIB

KW - HF etching

KW - Micro-nanofluidic

KW - Nanopores

KW - Pyrex

U2 - 10.1016/j.mee.2008.01.106

DO - 10.1016/j.mee.2008.01.106

M3 - Article

AN - SCOPUS:44349182737

SN - 0167-9317

VL - 85

SP - 1311

EP - 1313

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-6

ER -

A new way to integrate solid state nanopores for translocation experiments

Abstract

Keywords

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