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A new way to integrate solid state nanopores for translocation experiments

  • E. M. Huisman
  • , A. L. Biance
  • , A. Madouri
  • , G. Patriarche
  • , E. Bourhis
  • , G. Oukhaled
  • , L. Auvray
  • , J. Gierak
  • Centre de Nanosciences et de Nanotechnologies
  • Université d'Evry Val d'Essonne
  • ESYCOM

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The integration of the nanopore drilled in a nanometric thin and therefore fragile membrane in a macroscopic set-up necessitates a multiscale approach. An integration technique to select and support such a nanopore is described, using a Pyrex device with a micropore. Therefore, we developed a method to fabricate micrometer sized apertures in Pyrex wafers relying on a specific control of HF etching. The integration of FIB nanodrilled membrane in this Pyrex set-up is here discussed.

Original languageEnglish
Pages (from-to)1311-1313
Number of pages3
JournalMicroelectronic Engineering
Volume85
Issue number5-6
DOIs
Publication statusPublished - 1 May 2008
Externally publishedYes

Keywords

  • Bioapplications
  • FIB
  • HF etching
  • Micro-nanofluidic
  • Nanopores
  • Pyrex

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