Acetylene gas as a carbon source: An x-ray photoemission spectroscopy and near-edge x-ray absorption fine structure spectroscopy study of its stability on Si(111)-7×7

F. Rochet; G. Dufour; F. C. Stedile; F. Sirotti; P. Prieto; M. De Crescenzi

doi:10.1116/1.590036

Acetylene gas as a carbon source: An x-ray photoemission spectroscopy and near-edge x-ray absorption fine structure spectroscopy study of its stability on Si(111)-7×7

F. Rochet
, G. Dufour
, F. C. Stedile
, F. Sirotti
, P. Prieto
, M. De Crescenzi

Research output: Contribution to journal › Article › peer-review

Abstract

The electronic structure and bonding geometry of acetylene adsorbed at room temperature on Si(111)-7×7 is studied by a combination of synchrotron radiation x-ray photoemission spectroscopy and of near-edge x-ray absorption fine structure spectroscopy. Then the stability of the molecule, submitted to thermal annealings and to synchrotron white beam irradiation is examined. The possibility of using acetylene gas as a carbon source for the fabrication of silicon-carbon compounds (or for the formation of abrupt carbon/silicon interfaces) is discussed.

Original language	English
Pages (from-to)	1692-1696
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	16
Issue number	3
DOIs	https://doi.org/10.1116/1.590036
Publication status	Published - 1 Jan 1998
Externally published	Yes

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Rochet, F., Dufour, G., Stedile, F. C., Sirotti, F., Prieto, P., & De Crescenzi, M. (1998). Acetylene gas as a carbon source: An x-ray photoemission spectroscopy and near-edge x-ray absorption fine structure spectroscopy study of its stability on Si(111)-7×7. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 16(3), 1692-1696. https://doi.org/10.1116/1.590036

@article{87c0c81f5f0245d58138e74b8351cad6,

title = "Acetylene gas as a carbon source: An x-ray photoemission spectroscopy and near-edge x-ray absorption fine structure spectroscopy study of its stability on Si(111)-7×7",

abstract = "The electronic structure and bonding geometry of acetylene adsorbed at room temperature on Si(111)-7×7 is studied by a combination of synchrotron radiation x-ray photoemission spectroscopy and of near-edge x-ray absorption fine structure spectroscopy. Then the stability of the molecule, submitted to thermal annealings and to synchrotron white beam irradiation is examined. The possibility of using acetylene gas as a carbon source for the fabrication of silicon-carbon compounds (or for the formation of abrupt carbon/silicon interfaces) is discussed.",

author = "F. Rochet and G. Dufour and Stedile, \{F. C.\} and F. Sirotti and P. Prieto and \{De Crescenzi\}, M.",

year = "1998",

month = jan,

day = "1",

doi = "10.1116/1.590036",

language = "English",

volume = "16",

pages = "1692--1696",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

number = "3",

}

Rochet, F, Dufour, G, Stedile, FC, Sirotti, F, Prieto, P & De Crescenzi, M 1998, 'Acetylene gas as a carbon source: An x-ray photoemission spectroscopy and near-edge x-ray absorption fine structure spectroscopy study of its stability on Si(111)-7×7', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 16, no. 3, pp. 1692-1696. https://doi.org/10.1116/1.590036

Acetylene gas as a carbon source: An x-ray photoemission spectroscopy and near-edge x-ray absorption fine structure spectroscopy study of its stability on Si(111)-7×7. / Rochet, F.; Dufour, G.; Stedile, F. C. et al.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 16, No. 3, 01.01.1998, p. 1692-1696.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Acetylene gas as a carbon source

T2 - An x-ray photoemission spectroscopy and near-edge x-ray absorption fine structure spectroscopy study of its stability on Si(111)-7×7

AU - Rochet, F.

AU - Dufour, G.

AU - Stedile, F. C.

AU - Sirotti, F.

AU - Prieto, P.

AU - De Crescenzi, M.

PY - 1998/1/1

Y1 - 1998/1/1

N2 - The electronic structure and bonding geometry of acetylene adsorbed at room temperature on Si(111)-7×7 is studied by a combination of synchrotron radiation x-ray photoemission spectroscopy and of near-edge x-ray absorption fine structure spectroscopy. Then the stability of the molecule, submitted to thermal annealings and to synchrotron white beam irradiation is examined. The possibility of using acetylene gas as a carbon source for the fabrication of silicon-carbon compounds (or for the formation of abrupt carbon/silicon interfaces) is discussed.

AB - The electronic structure and bonding geometry of acetylene adsorbed at room temperature on Si(111)-7×7 is studied by a combination of synchrotron radiation x-ray photoemission spectroscopy and of near-edge x-ray absorption fine structure spectroscopy. Then the stability of the molecule, submitted to thermal annealings and to synchrotron white beam irradiation is examined. The possibility of using acetylene gas as a carbon source for the fabrication of silicon-carbon compounds (or for the formation of abrupt carbon/silicon interfaces) is discussed.

UR - https://www.scopus.com/pages/publications/11744273450

U2 - 10.1116/1.590036

DO - 10.1116/1.590036

M3 - Article

AN - SCOPUS:11744273450

SN - 1071-1023

VL - 16

SP - 1692

EP - 1696

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

ER -

Rochet F, Dufour G, Stedile FC, Sirotti F, Prieto P, De Crescenzi M. Acetylene gas as a carbon source: An x-ray photoemission spectroscopy and near-edge x-ray absorption fine structure spectroscopy study of its stability on Si(111)-7×7. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 1998 Jan 1;16(3):1692-1696. doi: 10.1116/1.590036

Acetylene gas as a carbon source: An x-ray photoemission spectroscopy and near-edge x-ray absorption fine structure spectroscopy study of its stability on Si(111)-7×7

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