Atomic-scale study of the role of carbon on boron clustering

T. Philippe; S. Duguay; J. J. Grob; D. Mathiot; D. Blavette

doi:10.1016/j.tsf.2009.08.022

Atomic-scale study of the role of carbon on boron clustering

T. Philippe
, S. Duguay
, J. J. Grob
, D. Mathiot
, D. Blavette

Research output: Contribution to journal › Article › peer-review

Abstract

Boron (BF₂, 20 keV, 3.14/cm²) and carbon (13 keV, 10¹⁵/cm²) implanted silicon annealed at 800 °C during 30 min or at 1000 °C during 10 s has been investigated using a laser-assisted wide-angle tomographic atom probe (LaWaTAP) instrument. Boron-silicon clusters containing ~ 1.3 at.% of boron atoms have been observed in boron implanted silicon with a concentration exceeding the solubility limit. Often identified as BICs, they are interpreted as a metastable phase. Furthermore, addition of carbon clearly reduced the clustering of boron. This was interpreted as a diminution of boron diffusion or as an increase of the solubility limit of boron. Carbon-silicon clusters containing ~ 1.5 at.% of carbon atoms were observed, maybe the precursors of the SiC phase.

Original language	English
Pages (from-to)	2406-2408
Number of pages	3
Journal	Thin Solid Films
Volume	518
Issue number	9
DOIs	https://doi.org/10.1016/j.tsf.2009.08.022
Publication status	Published - 26 Feb 2010
Externally published	Yes

Keywords

Boron
Carbon
Clustering
Laser atom probe tomography

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10.1016/j.tsf.2009.08.022

Cite this

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title = "Atomic-scale study of the role of carbon on boron clustering",

abstract = "Boron (BF2, 20 keV, 3.14/cm2) and carbon (13 keV, 1015/cm2) implanted silicon annealed at 800 °C during 30 min or at 1000 °C during 10 s has been investigated using a laser-assisted wide-angle tomographic atom probe (LaWaTAP) instrument. Boron-silicon clusters containing \textasciitilde{} 1.3 at.\% of boron atoms have been observed in boron implanted silicon with a concentration exceeding the solubility limit. Often identified as BICs, they are interpreted as a metastable phase. Furthermore, addition of carbon clearly reduced the clustering of boron. This was interpreted as a diminution of boron diffusion or as an increase of the solubility limit of boron. Carbon-silicon clusters containing \textasciitilde{} 1.5 at.\% of carbon atoms were observed, maybe the precursors of the SiC phase.",

keywords = "Boron, Carbon, Clustering, Laser atom probe tomography",

author = "T. Philippe and S. Duguay and Grob, \{J. J.\} and D. Mathiot and D. Blavette",

year = "2010",

month = feb,

day = "26",

doi = "10.1016/j.tsf.2009.08.022",

language = "English",

volume = "518",

pages = "2406--2408",

journal = "Thin Solid Films",

issn = "0040-6090",

number = "9",

}

TY - JOUR

T1 - Atomic-scale study of the role of carbon on boron clustering

AU - Philippe, T.

AU - Duguay, S.

AU - Grob, J. J.

AU - Mathiot, D.

AU - Blavette, D.

PY - 2010/2/26

Y1 - 2010/2/26

N2 - Boron (BF2, 20 keV, 3.14/cm2) and carbon (13 keV, 1015/cm2) implanted silicon annealed at 800 °C during 30 min or at 1000 °C during 10 s has been investigated using a laser-assisted wide-angle tomographic atom probe (LaWaTAP) instrument. Boron-silicon clusters containing ~ 1.3 at.% of boron atoms have been observed in boron implanted silicon with a concentration exceeding the solubility limit. Often identified as BICs, they are interpreted as a metastable phase. Furthermore, addition of carbon clearly reduced the clustering of boron. This was interpreted as a diminution of boron diffusion or as an increase of the solubility limit of boron. Carbon-silicon clusters containing ~ 1.5 at.% of carbon atoms were observed, maybe the precursors of the SiC phase.

AB - Boron (BF2, 20 keV, 3.14/cm2) and carbon (13 keV, 1015/cm2) implanted silicon annealed at 800 °C during 30 min or at 1000 °C during 10 s has been investigated using a laser-assisted wide-angle tomographic atom probe (LaWaTAP) instrument. Boron-silicon clusters containing ~ 1.3 at.% of boron atoms have been observed in boron implanted silicon with a concentration exceeding the solubility limit. Often identified as BICs, they are interpreted as a metastable phase. Furthermore, addition of carbon clearly reduced the clustering of boron. This was interpreted as a diminution of boron diffusion or as an increase of the solubility limit of boron. Carbon-silicon clusters containing ~ 1.5 at.% of carbon atoms were observed, maybe the precursors of the SiC phase.

KW - Boron

KW - Carbon

KW - Clustering

KW - Laser atom probe tomography

UR - https://www.scopus.com/pages/publications/76149137764

U2 - 10.1016/j.tsf.2009.08.022

DO - 10.1016/j.tsf.2009.08.022

M3 - Article

AN - SCOPUS:76149137764

SN - 0040-6090

VL - 518

SP - 2406

EP - 2408

JO - Thin Solid Films

JF - Thin Solid Films

IS - 9

ER -

Atomic-scale study of the role of carbon on boron clustering

Abstract

Keywords

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