Capacitive and ohmic RF NEMS switches based on vertical carbon nanotubes

A. Ziaei; M. Charles; M. Le Baillif; S. Xavier; A. Caillard; C. S. Cojocaru

doi:10.1017/S1759078710000619

Capacitive and ohmic RF NEMS switches based on vertical carbon nanotubes

A. Ziaei
, M. Charles
, M. Le Baillif
, S. Xavier
, A. Caillard
, C. S. Cojocaru

Thales Research & Technology
Institut polytechnique de Paris

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

The objective is to demonstrate a reproducible carbon nanotube (CNT)-based technology for radio frequency (RF) switch working in the range of 40-60GHz and fulfilling the specifications: low losses, high isolation, and an operating voltage below 30 V. The first processed component had an operating voltage of 14 V for an ohmic contact in a Nano-Electro Mechanical System (NEMS) tweezer design. This result is confirmed by theory with an operating voltage of 13 V. A capacitive-contact NEMS is also developed using multi-walled CNTs (MWCNTs) coated with a SiO2 dielectric layer deposited by electron beam induced deposition method (EBID). High Frequency Simulation Software (HFSS) RF-simulation on an innovative NEMS geometry shows encouraging results with transmission ratios between "on" state and "off" state up to 34% for ohmic-contact switch and 25% for a capacitive-contact switch.

Original language	English
Pages (from-to)	433-440
Number of pages	8
Journal	International Journal of Microwave and Wireless Technologies
Volume	2
Issue number	5
DOIs	https://doi.org/10.1017/S1759078710000619
Publication status	Published - 1 Oct 2010

Keywords

Carbon nano-tubes
MWCNT
NEMS
Nano-electro-mechanical
Radio frequency (RF)
Switch
van der Waals

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10.1017/S1759078710000619

Cite this

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title = "Capacitive and ohmic RF NEMS switches based on vertical carbon nanotubes",

abstract = "The objective is to demonstrate a reproducible carbon nanotube (CNT)-based technology for radio frequency (RF) switch working in the range of 40-60GHz and fulfilling the specifications: low losses, high isolation, and an operating voltage below 30 V. The first processed component had an operating voltage of 14 V for an ohmic contact in a Nano-Electro Mechanical System (NEMS) tweezer design. This result is confirmed by theory with an operating voltage of 13 V. A capacitive-contact NEMS is also developed using multi-walled CNTs (MWCNTs) coated with a SiO2 dielectric layer deposited by electron beam induced deposition method (EBID). High Frequency Simulation Software (HFSS) RF-simulation on an innovative NEMS geometry shows encouraging results with transmission ratios between {"}on{"} state and {"}off{"} state up to 34\% for ohmic-contact switch and 25\% for a capacitive-contact switch.",

keywords = "Carbon nano-tubes, MWCNT, NEMS, Nano-electro-mechanical, Radio frequency (RF), Switch, van der Waals",

author = "A. Ziaei and M. Charles and \{Le Baillif\}, M. and S. Xavier and A. Caillard and Cojocaru, \{C. S.\}",

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T1 - Capacitive and ohmic RF NEMS switches based on vertical carbon nanotubes

AU - Ziaei, A.

AU - Charles, M.

AU - Le Baillif, M.

AU - Xavier, S.

AU - Caillard, A.

AU - Cojocaru, C. S.

PY - 2010/10/1

Y1 - 2010/10/1

N2 - The objective is to demonstrate a reproducible carbon nanotube (CNT)-based technology for radio frequency (RF) switch working in the range of 40-60GHz and fulfilling the specifications: low losses, high isolation, and an operating voltage below 30 V. The first processed component had an operating voltage of 14 V for an ohmic contact in a Nano-Electro Mechanical System (NEMS) tweezer design. This result is confirmed by theory with an operating voltage of 13 V. A capacitive-contact NEMS is also developed using multi-walled CNTs (MWCNTs) coated with a SiO2 dielectric layer deposited by electron beam induced deposition method (EBID). High Frequency Simulation Software (HFSS) RF-simulation on an innovative NEMS geometry shows encouraging results with transmission ratios between "on" state and "off" state up to 34% for ohmic-contact switch and 25% for a capacitive-contact switch.

AB - The objective is to demonstrate a reproducible carbon nanotube (CNT)-based technology for radio frequency (RF) switch working in the range of 40-60GHz and fulfilling the specifications: low losses, high isolation, and an operating voltage below 30 V. The first processed component had an operating voltage of 14 V for an ohmic contact in a Nano-Electro Mechanical System (NEMS) tweezer design. This result is confirmed by theory with an operating voltage of 13 V. A capacitive-contact NEMS is also developed using multi-walled CNTs (MWCNTs) coated with a SiO2 dielectric layer deposited by electron beam induced deposition method (EBID). High Frequency Simulation Software (HFSS) RF-simulation on an innovative NEMS geometry shows encouraging results with transmission ratios between "on" state and "off" state up to 34% for ohmic-contact switch and 25% for a capacitive-contact switch.

KW - Carbon nano-tubes

KW - MWCNT

KW - NEMS

KW - Nano-electro-mechanical

KW - Radio frequency (RF)

KW - Switch

KW - van der Waals

U2 - 10.1017/S1759078710000619

DO - 10.1017/S1759078710000619

M3 - Article

AN - SCOPUS:79952842034

SN - 1759-0787

VL - 2

SP - 433

EP - 440

JO - International Journal of Microwave and Wireless Technologies

JF - International Journal of Microwave and Wireless Technologies

IS - 5

ER -

Capacitive and ohmic RF NEMS switches based on vertical carbon nanotubes

Abstract

Keywords

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