Catalytic role of boron atoms in self-interstitial clustering in Si

Gyeong S. Hwang; William A. Goddard

doi:10.1063/1.1596729

Catalytic role of boron atoms in self-interstitial clustering in Si

Gyeong S. Hwang
, William A. Goddard

Research output: Contribution to journal › Article › peer-review

Abstract

The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.

Original language	English
Pages (from-to)	1047-1049
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	5
DOIs	https://doi.org/10.1063/1.1596729
Publication status	Published - 4 Aug 2003
Externally published	Yes

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title = "Catalytic role of boron atoms in self-interstitial clustering in Si",

abstract = "The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.",

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AU - Goddard, William A.

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N2 - The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.

AB - The influence of boron atoms on self-intersitial clustering in Si was investigated using density functional theory and kinetic simulations. The first principles calculations showed the reduction of boron and intersitial interaction with the number of intersitials incorporated, leading to boron liberation. A comparision of experiments was found to support the boron liberation.

UR - https://www.scopus.com/pages/publications/0042878635

U2 - 10.1063/1.1596729

DO - 10.1063/1.1596729

M3 - Article

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VL - 83

SP - 1047

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 5

ER -

Catalytic role of boron atoms in self-interstitial clustering in Si

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