CF A²σ⁺-X²Π and B² Δ - X²Π study by broadband absorption spectroscopy in a plasma etch reactor: Determination of transition probabilities, CF X²Π concentrations, and gas temperatures

A systematic study of the spectral intensities of the CF A-X and B-X bands by broadband absorption spectroscopy is presented. As such, the CF A²∑⁺v'=3 level and found that it is highly predissociated. Experimentally derived electronic transition moments are used to derive absolute transition probabilities after renormalization to the CF A²∑⁺v'=0 experimental radiative lifetime. It is shown by the intensity data for the CF B-X system that the interaction between CF B²Δ state and Rydberg 3d²Δ at short distance is weak.