Abstract
Quantum chemical methods are applied to the structure of the clean GaAs (110) surface and the chemisorption of oxygen and aluminum. It is found that results for small clusters give geometries for the clean surface in agreement with those observed experimentally. It is proposed that an intermediate stage of oxidation would exist in which the O atom binds to a surface As. The investigation shows that the initial site of Al chemisorbed on GaAs (110) has the Al bonded to the surface Ga. Geometries and chemical shifts are reported for both O and Al on GaAs (110). The chemical shifts are in agreement with recent experimental results.
| Original language | English |
|---|---|
| Pages (from-to) | 164-168 |
| Number of pages | 5 |
| Journal | J Vac Sci Technol |
| Volume | 17 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1 Jan 1979 |
| Externally published | Yes |
| Event | Proc of the Natl Symp of the Am Vac Soc, 26th - New York, NY, USA Duration: 1 Oct 1979 → 5 Oct 1979 |
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