Comparison of micro poly-Si grains formed by blue multi laser diode annealing (BLDA) and plasma enhanced chemical vapor deposition (PE-CVD)

Katsuva Shirai; Satoshi Chinen; Tatsuya Okada; Takashi Noguchi; Dmitri Daineka; Yvan Bonnassieux

Comparison of micro poly-Si grains formed by blue multi laser diode annealing (BLDA) and plasma enhanced chemical vapor deposition (PE-CVD)

Katsuva Shirai
, Satoshi Chinen
, Tatsuya Okada
, Takashi Noguchi
, Dmitri Daineka
, Yvan Bonnassieux

University of the Ryukyus

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Characteristics of micro poly-Si grains formed by BLDA and PE-CVD were compared. Randomly oriented small grains were obtained directly by PE-CVD. Uniform micro poly-Si grains with preferred crystal orientation of (111) face were obtained by controlling the irradiation condition of BLDA.

Original language	English
Title of host publication	Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012
Pages	654-655
Number of pages	2
Publication status	Published - 1 Dec 2012
Event	19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012 - Kyoto, Japan Duration: 4 Dec 2012 → 7 Dec 2012

Publication series

Name	Proceedings of the International Display Workshops
Volume	2
ISSN (Print)	1883-2490

Conference

Conference	19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012
Country/Territory	Japan
City	Kyoto
Period	4/12/12 → 7/12/12

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Keywords

As deposition
Blue laser
LTPS
Micro poly-Si
PE-CVD

Cite this

Shirai, K., Chinen, S., Okada, T., Noguchi, T., Daineka, D., & Bonnassieux, Y. (2012). Comparison of micro poly-Si grains formed by blue multi laser diode annealing (BLDA) and plasma enhanced chemical vapor deposition (PE-CVD). In Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012 (pp. 654-655). (Proceedings of the International Display Workshops; Vol. 2).

@inproceedings{b00696a029da447f8a99f9cdf532bd9a,

title = "Comparison of micro poly-Si grains formed by blue multi laser diode annealing (BLDA) and plasma enhanced chemical vapor deposition (PE-CVD)",

abstract = "Characteristics of micro poly-Si grains formed by BLDA and PE-CVD were compared. Randomly oriented small grains were obtained directly by PE-CVD. Uniform micro poly-Si grains with preferred crystal orientation of (111) face were obtained by controlling the irradiation condition of BLDA.",

keywords = "As deposition, Blue laser, LTPS, Micro poly-Si, PE-CVD",

author = "Katsuva Shirai and Satoshi Chinen and Tatsuya Okada and Takashi Noguchi and Dmitri Daineka and Yvan Bonnassieux",

year = "2012",

month = dec,

day = "1",

language = "English",

isbn = "9781627486521",

series = "Proceedings of the International Display Workshops",

pages = "654--655",

booktitle = "Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012",

note = "19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012 ; Conference date: 04-12-2012 Through 07-12-2012",

}

Shirai, K, Chinen, S, Okada, T, Noguchi, T, Daineka, D & Bonnassieux, Y 2012, Comparison of micro poly-Si grains formed by blue multi laser diode annealing (BLDA) and plasma enhanced chemical vapor deposition (PE-CVD). in Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012. Proceedings of the International Display Workshops, vol. 2, pp. 654-655, 19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012, Kyoto, Japan, 4/12/12.

Comparison of micro poly-Si grains formed by blue multi laser diode annealing (BLDA) and plasma enhanced chemical vapor deposition (PE-CVD). / Shirai, Katsuva; Chinen, Satoshi; Okada, Tatsuya et al.
Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012. 2012. p. 654-655 (Proceedings of the International Display Workshops; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Comparison of micro poly-Si grains formed by blue multi laser diode annealing (BLDA) and plasma enhanced chemical vapor deposition (PE-CVD)

AU - Shirai, Katsuva

AU - Chinen, Satoshi

AU - Okada, Tatsuya

AU - Noguchi, Takashi

AU - Daineka, Dmitri

AU - Bonnassieux, Yvan

PY - 2012/12/1

Y1 - 2012/12/1

N2 - Characteristics of micro poly-Si grains formed by BLDA and PE-CVD were compared. Randomly oriented small grains were obtained directly by PE-CVD. Uniform micro poly-Si grains with preferred crystal orientation of (111) face were obtained by controlling the irradiation condition of BLDA.

AB - Characteristics of micro poly-Si grains formed by BLDA and PE-CVD were compared. Randomly oriented small grains were obtained directly by PE-CVD. Uniform micro poly-Si grains with preferred crystal orientation of (111) face were obtained by controlling the irradiation condition of BLDA.

KW - As deposition

KW - Blue laser

KW - LTPS

KW - Micro poly-Si

KW - PE-CVD

UR - https://www.scopus.com/pages/publications/84885923432

M3 - Conference contribution

AN - SCOPUS:84885923432

SN - 9781627486521

T3 - Proceedings of the International Display Workshops

SP - 654

EP - 655

BT - Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012

T2 - 19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012

Y2 - 4 December 2012 through 7 December 2012

ER -

Shirai K, Chinen S, Okada T, Noguchi T, Daineka D, Bonnassieux Y. Comparison of micro poly-Si grains formed by blue multi laser diode annealing (BLDA) and plasma enhanced chemical vapor deposition (PE-CVD). In Society for Information Display - 19th International Display Workshops 2012, IDW/AD 2012. 2012. p. 654-655. (Proceedings of the International Display Workshops).

Comparison of micro poly-Si grains formed by blue multi laser diode annealing (BLDA) and plasma enhanced chemical vapor deposition (PE-CVD)

Abstract

Publication series

Conference

UN SDGs

Keywords

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Cite this