TY - GEN
T1 - Comparison of (n+) a-Si:H / (p) c-Si heterojunction emitters using a-Si:H films deposited by PECVD or HWCVD
AU - Martin, Isidro
AU - Muñoz, Delfina
AU - Voz, Cristóbal
AU - Vetter, Michael
AU - Alcubilla, Ramon
AU - Damon-Lacoste, Jerome
AU - Roca I Cabarrocas, Pere
AU - Villar, Fernando
AU - Bertomeu, Joan
AU - Andreu, Jordi
PY - 2006/1/1
Y1 - 2006/1/1
N2 - In this work, we report on the last investigations of (n+) a-Si:H / (p) c-Si heterojunction solar cells deposited by both HWCVD and PECVD. Regarding HWCVD films, we use Spectroscopic Ellipsometry measurements to characterize the material properties of the deposited films. Particularly, we study the effect of the (i) a-Si:H film on the (n+) a-Si:H film growth. As far as PECVD films are concerned, an optimum PH3 flow is determined from the point of view of dark conductivity. Additionally, QSS-PC measurements are used to determine the improvement in the passivation quality of this film. Finally, HWCVD and PECVD HIT emitters are compared. A high quality in both emitters is deduced with implied Voc values exceeding 665 mV.
AB - In this work, we report on the last investigations of (n+) a-Si:H / (p) c-Si heterojunction solar cells deposited by both HWCVD and PECVD. Regarding HWCVD films, we use Spectroscopic Ellipsometry measurements to characterize the material properties of the deposited films. Particularly, we study the effect of the (i) a-Si:H film on the (n+) a-Si:H film growth. As far as PECVD films are concerned, an optimum PH3 flow is determined from the point of view of dark conductivity. Additionally, QSS-PC measurements are used to determine the improvement in the passivation quality of this film. Finally, HWCVD and PECVD HIT emitters are compared. A high quality in both emitters is deduced with implied Voc values exceeding 665 mV.
U2 - 10.1109/WCPEC.2006.279332
DO - 10.1109/WCPEC.2006.279332
M3 - Conference contribution
AN - SCOPUS:41749104854
SN - 1424400163
SN - 9781424400164
T3 - Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4
SP - 1091
EP - 1094
BT - Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4
PB - IEEE Computer Society
T2 - 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4
Y2 - 7 May 2006 through 12 May 2006
ER -
