Composition and instabilities of Ar/SF6 inductive plasma discharges

M. Tuszewski; A. M. Marakhtanov; P. Chabert; A. J. Lichtenberg; M. A. Lieberman; R. R. White

Composition and instabilities of Ar/SF6 inductive plasma discharges

M. Tuszewski, A. M. Marakhtanov, P. Chabert, A. J. Lichtenberg, M. A. Lieberman, R. R. White

MST-8, Los Alamos National Laboratory

Research output: Contribution to journal › Conference article › peer-review

Abstract

An overview is given on new data from Ar/SF6 (1:1) plasma discharges concerning plasma chemistry and instability phenomena. The data may permit to modify the instability model to obtain a more quantitative agreement with the experimental observations.

Original language	English
Pages (from-to)	290
Number of pages	1
Journal	IEEE International Conference on Plasma Science
Publication status	Published - 1 Jan 2002
Externally published	Yes
Event	2002 IEEE International Conference on plasma Science - Banff, Alta., Canada Duration: 26 May 2002 → 30 May 2002

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@article{6b5b6df7d74740ad85bba79db57e79ad,

title = "Composition and instabilities of Ar/SF6 inductive plasma discharges",

abstract = "An overview is given on new data from Ar/SF6 (1:1) plasma discharges concerning plasma chemistry and instability phenomena. The data may permit to modify the instability model to obtain a more quantitative agreement with the experimental observations.",

author = "M. Tuszewski and Marakhtanov, \{A. M.\} and P. Chabert and Lichtenberg, \{A. J.\} and Lieberman, \{M. A.\} and White, \{R. R.\}",

year = "2002",

month = jan,

day = "1",

language = "English",

pages = "290",

journal = "IEEE International Conference on Plasma Science",

issn = "0730-9244",

note = "2002 IEEE International Conference on plasma Science ; Conference date: 26-05-2002 Through 30-05-2002",

}

TY - JOUR

T1 - Composition and instabilities of Ar/SF6 inductive plasma discharges

AU - Tuszewski, M.

AU - Marakhtanov, A. M.

AU - Chabert, P.

AU - Lichtenberg, A. J.

AU - Lieberman, M. A.

AU - White, R. R.

PY - 2002/1/1

Y1 - 2002/1/1

N2 - An overview is given on new data from Ar/SF6 (1:1) plasma discharges concerning plasma chemistry and instability phenomena. The data may permit to modify the instability model to obtain a more quantitative agreement with the experimental observations.

AB - An overview is given on new data from Ar/SF6 (1:1) plasma discharges concerning plasma chemistry and instability phenomena. The data may permit to modify the instability model to obtain a more quantitative agreement with the experimental observations.

M3 - Conference article

AN - SCOPUS:0036367068

SN - 0730-9244

SP - 290

JO - IEEE International Conference on Plasma Science

JF - IEEE International Conference on Plasma Science

T2 - 2002 IEEE International Conference on plasma Science

Y2 - 26 May 2002 through 30 May 2002

ER -

Composition and instabilities of Ar/SF6 inductive plasma discharges

Abstract

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