Damping of optomechanical disks resonators vibrating in air

D. Parrain; C. Baker; T. Verdier; P. Senellart; A. Lemaitre; S. Ducci; G. Leo; I. Favero

doi:10.1063/1.4729014

Damping of optomechanical disks resonators vibrating in air

D. Parrain
, C. Baker
, T. Verdier
, P. Senellart
, A. Lemaitre
, S. Ducci
, G. Leo
, I. Favero

École Polytechnique

Research output: Contribution to journal › Article › peer-review

Abstract

We report on miniature GaAs disk optomechanical resonators vibrating in air in the radiofrequency range. The flexural modes of the disks are studied by scanning electron microscopy and optical interferometry, and correctly modeled with the elasticity theory for annular plates. The mechanical damping is systematically measured, and confronted with original analytical models for air damping. Formulas are derived that correctly reproduce both the mechanical modes and the damping behavior, and can serve as design tools for optomechanical applications in fluidic environment.

Original language	English
Article number	242105
Journal	Applied Physics Letters
Volume	100
Issue number	24
DOIs	https://doi.org/10.1063/1.4729014
Publication status	Published - 11 Jun 2012

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title = "Damping of optomechanical disks resonators vibrating in air",

abstract = "We report on miniature GaAs disk optomechanical resonators vibrating in air in the radiofrequency range. The flexural modes of the disks are studied by scanning electron microscopy and optical interferometry, and correctly modeled with the elasticity theory for annular plates. The mechanical damping is systematically measured, and confronted with original analytical models for air damping. Formulas are derived that correctly reproduce both the mechanical modes and the damping behavior, and can serve as design tools for optomechanical applications in fluidic environment.",

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AU - Baker, C.

AU - Verdier, T.

AU - Senellart, P.

AU - Lemaitre, A.

AU - Ducci, S.

AU - Leo, G.

AU - Favero, I.

PY - 2012/6/11

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N2 - We report on miniature GaAs disk optomechanical resonators vibrating in air in the radiofrequency range. The flexural modes of the disks are studied by scanning electron microscopy and optical interferometry, and correctly modeled with the elasticity theory for annular plates. The mechanical damping is systematically measured, and confronted with original analytical models for air damping. Formulas are derived that correctly reproduce both the mechanical modes and the damping behavior, and can serve as design tools for optomechanical applications in fluidic environment.

AB - We report on miniature GaAs disk optomechanical resonators vibrating in air in the radiofrequency range. The flexural modes of the disks are studied by scanning electron microscopy and optical interferometry, and correctly modeled with the elasticity theory for annular plates. The mechanical damping is systematically measured, and confronted with original analytical models for air damping. Formulas are derived that correctly reproduce both the mechanical modes and the damping behavior, and can serve as design tools for optomechanical applications in fluidic environment.

U2 - 10.1063/1.4729014

DO - 10.1063/1.4729014

M3 - Article

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SN - 0003-6951

VL - 100

JO - Applied Physics Letters

JF - Applied Physics Letters

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Damping of optomechanical disks resonators vibrating in air

Abstract

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