Depolarization effect in rare-earth doped Y₂O₃ films in blue and UV spectral range

The 200 to 300 nm thick, Er and Er,Yb doped Y₂O₃ films deposited onto silicon substrate by spin coating have been studied by spectroscopic ellipsometry over the 192-1680 nm spectral range at room temperature. All samples have been found to be strongly depolarizing in the blue and UV part of the spectrum. Complimentary examination of the sample surfaces, using confocal photoluminescence microscopy has disclosed the non-uniform distribution of the rare-earth dopants. The depolarization effects have then been modeled and found to be best reproduced by taking the thickness non-uniformity as the main source of depolarization. The optical constants of the studied films have been determined after four-step modeling with sequential decrease of the mean square error.