Deposition of high-efficiency microcrystalline silicon solar cells using SiF4/H2/Ar mixtures

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Abstract

In this paper, we present results on microcrystalline silicon solar cells that are deposited from SiF4/H2/Ar mixtures, on which efficiencies exceeding 9% have already been obtained. Structural characterizations of the cells indicate a fully crystalline material with no preferential crystallographic orientation. This suggests that, as opposed to microcrystalline silicon cells deposited using silane, an amorphous phase is not required to passivate defects at column boundaries. These results are discussed in light of the specific growth mechanism and structural properties associated with film deposition using SiF4. They pave the way toward low-cost, high-performance polycrystalline cells on glass.

Original languageEnglish
Title of host publication2012 IEEE 38th Photovoltaic Specialists Conference, PVSC 2012
EditionPART 2
DOIs
Publication statusPublished - 1 Dec 2012
Event2012 IEEE 38th Photovoltaic Specialists Conference, PVSC 2012 - Austin, TX, United States
Duration: 3 Jun 20128 Jun 2012

Publication series

NameConference Record of the IEEE Photovoltaic Specialists Conference
NumberPART 2
ISSN (Print)0160-8371

Conference

Conference2012 IEEE 38th Photovoltaic Specialists Conference, PVSC 2012
Country/TerritoryUnited States
CityAustin, TX
Period3/06/128/06/12

Keywords

  • Microcrystalline silicon
  • silicon tetrafluoride
  • solar cells
  • thin films

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