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Detection of h atoms in the flowing afterglow of a H2 microwave plasma by multiphoton laser-induced fluorescence: Atom-removal kinetics

  • J. Deson
  • , F. Haloua
  • , C. Lalo
  • , A. Rousseau
  • , V. Veniard
  • Laboratoire de Chimie Générale UPMC-CNRS URA 1428
  • Université Paris-Saclay

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

A multiphoton (2+1) absorption laser-induced fluorescence diagnostic is employed for determination of the spatial distribution of atomic hydrogen density in the post-discharge of a low-pressure microwave-induced H2 plasma, using one pulsed frequency-doubled dye laser. H atom density profiles are described by a simple diffusion equation and the probability of recombination of H atoms on silica is deduced from the profiles.

Original languageEnglish
Pages (from-to)2320-2328
Number of pages9
JournalJournal of Physics D: Applied Physics
Volume27
Issue number11
DOIs
Publication statusPublished - 14 Nov 1994

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