Detection of stable positive fixed charges in AlOx activated during annealing with in situ modulated PhotoLuminescence

Anatole Desthieux; Mengkoing Sreng; Pavel Bulkin; Ileana Florea; Etienne Drahi; Barbara Bazer-Bachi; Jean Charles Vanel; François Silva; Jorge Posada; Pere Roca i Cabarrocas

doi:10.1016/j.solmat.2021.111172

Detection of stable positive fixed charges in AlO_x activated during annealing with in situ modulated PhotoLuminescence

Anatole Desthieux
, Mengkoing Sreng
, Pavel Bulkin
, Ileana Florea
, Etienne Drahi
, Barbara Bazer-Bachi
, Jean Charles Vanel
, François Silva
, Jorge Posada
, Pere Roca i Cabarrocas

Research output: Contribution to journal › Article › peer-review

Abstract

An in situ Modulated Photoluminescence (MPL) measurement setup mounted on a Plasma Enhanced Chemical Vapor Deposition (PECVD) reactor is described. A method for deriving the actual minority carrier lifetime at the specific injection level of 1.10¹⁵ cm⁻³ is presented. This tool was used in a case study to monitor the passivation properties of aluminum oxide (AlO_x) thin films upon annealing. Interesting kinetics, such as a drop of lifetime at temperatures higher than 250 °C along with a recovery of the lifetime during the cooling phase, are shown. Moreover, these in situ results combined with ex situ studies allowed us to demonstrate the formation a stable high positive fixed charge density in the AlO_x layer (+1.10¹² cm⁻²) as a consequence of the combination of annealing and light exposure.

Original language	English
Article number	111172
Journal	Solar Energy Materials and Solar Cells
Volume	230
DOIs	https://doi.org/10.1016/j.solmat.2021.111172
Publication status	Published - 15 Sept 2021

Keywords

Aluminum oxide
Annealing
Fixed charges
In situ
Modulated photoluminescence
Silicon solar cells

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1016/j.solmat.2021.111172

Cite this

Desthieux, A., Sreng, M., Bulkin, P., Florea, I., Drahi, E., Bazer-Bachi, B., Vanel, J. C., Silva, F., Posada, J., & Roca i Cabarrocas, P. (2021). Detection of stable positive fixed charges in AlO_x activated during annealing with in situ modulated PhotoLuminescence. Solar Energy Materials and Solar Cells, 230, Article 111172. https://doi.org/10.1016/j.solmat.2021.111172

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title = "Detection of stable positive fixed charges in AlOx activated during annealing with in situ modulated PhotoLuminescence",

abstract = "An in situ Modulated Photoluminescence (MPL) measurement setup mounted on a Plasma Enhanced Chemical Vapor Deposition (PECVD) reactor is described. A method for deriving the actual minority carrier lifetime at the specific injection level of 1.1015 cm−3 is presented. This tool was used in a case study to monitor the passivation properties of aluminum oxide (AlOx) thin films upon annealing. Interesting kinetics, such as a drop of lifetime at temperatures higher than 250 °C along with a recovery of the lifetime during the cooling phase, are shown. Moreover, these in situ results combined with ex situ studies allowed us to demonstrate the formation a stable high positive fixed charge density in the AlOx layer (+1.1012 cm−2) as a consequence of the combination of annealing and light exposure.",

keywords = "Aluminum oxide, Annealing, Fixed charges, In situ, Modulated photoluminescence, Silicon solar cells",

author = "Anatole Desthieux and Mengkoing Sreng and Pavel Bulkin and Ileana Florea and Etienne Drahi and Barbara Bazer-Bachi and Vanel, \{Jean Charles\} and Fran{\c c}ois Silva and Jorge Posada and \{Roca i Cabarrocas\}, Pere",

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doi = "10.1016/j.solmat.2021.111172",

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T1 - Detection of stable positive fixed charges in AlOx activated during annealing with in situ modulated PhotoLuminescence

AU - Desthieux, Anatole

AU - Sreng, Mengkoing

AU - Bulkin, Pavel

AU - Florea, Ileana

AU - Drahi, Etienne

AU - Bazer-Bachi, Barbara

AU - Vanel, Jean Charles

AU - Silva, François

AU - Posada, Jorge

AU - Roca i Cabarrocas, Pere

PY - 2021/9/15

Y1 - 2021/9/15

N2 - An in situ Modulated Photoluminescence (MPL) measurement setup mounted on a Plasma Enhanced Chemical Vapor Deposition (PECVD) reactor is described. A method for deriving the actual minority carrier lifetime at the specific injection level of 1.1015 cm−3 is presented. This tool was used in a case study to monitor the passivation properties of aluminum oxide (AlOx) thin films upon annealing. Interesting kinetics, such as a drop of lifetime at temperatures higher than 250 °C along with a recovery of the lifetime during the cooling phase, are shown. Moreover, these in situ results combined with ex situ studies allowed us to demonstrate the formation a stable high positive fixed charge density in the AlOx layer (+1.1012 cm−2) as a consequence of the combination of annealing and light exposure.

AB - An in situ Modulated Photoluminescence (MPL) measurement setup mounted on a Plasma Enhanced Chemical Vapor Deposition (PECVD) reactor is described. A method for deriving the actual minority carrier lifetime at the specific injection level of 1.1015 cm−3 is presented. This tool was used in a case study to monitor the passivation properties of aluminum oxide (AlOx) thin films upon annealing. Interesting kinetics, such as a drop of lifetime at temperatures higher than 250 °C along with a recovery of the lifetime during the cooling phase, are shown. Moreover, these in situ results combined with ex situ studies allowed us to demonstrate the formation a stable high positive fixed charge density in the AlOx layer (+1.1012 cm−2) as a consequence of the combination of annealing and light exposure.

KW - Aluminum oxide

KW - Annealing

KW - Fixed charges

KW - In situ

KW - Modulated photoluminescence

KW - Silicon solar cells

U2 - 10.1016/j.solmat.2021.111172

DO - 10.1016/j.solmat.2021.111172

M3 - Article

AN - SCOPUS:85105802782

SN - 0927-0248

VL - 230

JO - Solar Energy Materials and Solar Cells

JF - Solar Energy Materials and Solar Cells

M1 - 111172

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