Abstract
The presence of an electron rich inversion layer in p -type crystalline silicon (c-Si) at the interface with n -type hydrogenated amorphous silicon (a-Si:H) is experimentally demonstrated from the coplanar conductance of (n) a-Si:H (p) c-Si structures, which is shown to be very sensitive to the band mismatch between the two semiconductors. The temperature dependence of the corresponding sheet electron density allows to determine with a very good precision the conduction band offset Δ EC between a-Si:H and c-Si:Δ EC =0.15±0.04 eV.
| Original language | English |
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| Article number | 162101 |
| Journal | Applied Physics Letters |
| Volume | 92 |
| Issue number | 16 |
| DOIs | |
| Publication status | Published - 1 May 2008 |