Determination of the conduction band offset between hydrogenated amorphous silicon and crystalline silicon from surface inversion layer conductance measurements

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Abstract

The presence of an electron rich inversion layer in p -type crystalline silicon (c-Si) at the interface with n -type hydrogenated amorphous silicon (a-Si:H) is experimentally demonstrated from the coplanar conductance of (n) a-Si:H (p) c-Si structures, which is shown to be very sensitive to the band mismatch between the two semiconductors. The temperature dependence of the corresponding sheet electron density allows to determine with a very good precision the conduction band offset Δ EC between a-Si:H and c-Si:Δ EC =0.15±0.04 eV.

Original languageEnglish
Article number162101
JournalApplied Physics Letters
Volume92
Issue number16
DOIs
Publication statusPublished - 1 May 2008

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