@inproceedings{b69ced2ba0ec4b1abc632382bdb4331e,
title = "Developments of EUV /X-ray wavefront sensors and adaptive optics at Imagine Optic",
abstract = "Imagine Optic (IO) is actively developing EUV to X-ray wavefront (WF) sensors since 2003 for applications on metrology of EUV to X-ray beams emitted by synchrotrons, free-electron lasers, plasma-based soft X-ray lasers and high harmonic generation. Our sensors have demonstrated their high usefulness for metrology of EUV to X-ray optics from single flat or curved mirrors to more complex optical systems (Schwarzschild, Kirkpatrick-Baez static or based on bender technology or with activators). Our most recent developments include the realization of a EUV sensor adapted to strongly convergent or divergent beams having numerical aperture as high as 0.15, as well as the production of a hard Xray sensor working at 10 keV and higher energies, providing repeatability as good as 4 pm rms. We present a review of the developed sensors, as well as experimental demonstrations of their benefits for various metrology and WF optimization requirements.",
keywords = "Adaptive optic, Bender, EUV wavefront sensor, Hartmann, X-ray wavefront sensor",
author = "\{De La Rochefoucauld\}, Ombeline and Samuel Bucourt and Daniele Cocco and Guillaume Dovillaire and Fabrice Harms and Mourad Idir and Dietmar Korn and Xavier Levecq and Agathe Marmin and Lionel Nicolas and Martin Piponnier and Lorenzo Raimondi and Philippe Zeitoun",
note = "Publisher Copyright: {\textcopyright} 2018 SPIE.; Adaptive X-Ray Optics V 2018 ; Conference date: 21-08-2018",
year = "2018",
month = jan,
day = "1",
doi = "10.1117/12.2320927",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Daniele Spiga and Hidekazu Mimura and Daniele Spiga",
booktitle = "Adaptive X-Ray Optics V",
}