Differential interferometry with a complex contrast

L. Bellon; S. Ciliberto; H. Boubaker; L. Guyon

doi:10.1016/S0030-4018(02)01475-X

Differential interferometry with a complex contrast

L. Bellon, S. Ciliberto, H. Boubaker, L. Guyon

Ecole Normale Supérieure de Lyon

Research output: Contribution to journal › Article › peer-review

Abstract

We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10^-13 m/√Hz. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts.

Original language	English
Pages (from-to)	49-56
Number of pages	8
Journal	Optics Communications
Volume	207
Issue number	1-6
DOIs	https://doi.org/10.1016/S0030-4018(02)01475-X
Publication status	Published - 15 Jun 2002
Externally published	Yes

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10.1016/S0030-4018(02)01475-X

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title = "Differential interferometry with a complex contrast",

abstract = "We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10-13 m/√Hz. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts.",

author = "L. Bellon and S. Ciliberto and H. Boubaker and L. Guyon",

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T1 - Differential interferometry with a complex contrast

AU - Bellon, L.

AU - Ciliberto, S.

AU - Boubaker, H.

AU - Guyon, L.

PY - 2002/6/15

Y1 - 2002/6/15

N2 - We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10-13 m/√Hz. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts.

AB - We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10-13 m/√Hz. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts.

U2 - 10.1016/S0030-4018(02)01475-X

DO - 10.1016/S0030-4018(02)01475-X

M3 - Article

AN - SCOPUS:0037097336

SN - 0030-4018

VL - 207

SP - 49

EP - 56

JO - Optics Communications

JF - Optics Communications

IS - 1-6

ER -

Differential interferometry with a complex contrast

Abstract

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