Direct comparison of AFM and SEM measurements on the same set of nanoparticles

This article is the first step in the development of a hybrid metrology combining AFM and SEM techniques for measuring the dimensions of a nanoparticle population in 3D space (X,Y,Z). This method exploits the strengths of each technique on the same set of nanoparticles. AFM is used for measuring the nanoparticle height and the measurements along X and Y axes are deduced from SEM images. A sampling method is proposed in order to obtain the best deposition conditions of SiO₂ and gold nanoparticles on mica or silicon substrates. Only the isolated nanoparticles are taken into account in the histogram of size distribution. Moreover, a semi-automatic Matlab routine has also been developed to process the AFM and SEM images, measure and count the nanoparticles. This routine allows the user to exclusively select the isolated nanoparticles through a control interface. The measurements have been performed on spherical-like nanoparticles to test the method by comparing the results obtained with both techniques.