Direct measurement of spatial modes of a microcantilever from thermal noise

Pierdomenico Paolino; Bruno Tiribilli; Ludovic Bellon

doi:10.1063/1.3245394

Direct measurement of spatial modes of a microcantilever from thermal noise

Pierdomenico Paolino, Bruno Tiribilli, Ludovic Bellon

Research output: Contribution to journal › Article › peer-review

Abstract

Measurements of the deflection induced by thermal noise have been performed on a rectangular atomic force microscope cantilever in air. The detection method, based on polarization interferometry, can achieve a resolution of 10^-14 m/ √Hz in the frequency range 1-800 kHz. The focused beam from the interferometer probes the cantilever at different positions along its length, and the spatial modes' shapes are determined up to the fourth resonance, without external excitation. Results are in good agreement with theoretically expected behavior. From this analysis accurate determination of the elastic constant of the cantilever is also achieved.

Original language	English
Article number	094313
Journal	Journal of Applied Physics
Volume	106
Issue number	9
DOIs	https://doi.org/10.1063/1.3245394
Publication status	Published - 1 Jan 2009
Externally published	Yes

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title = "Direct measurement of spatial modes of a microcantilever from thermal noise",

abstract = "Measurements of the deflection induced by thermal noise have been performed on a rectangular atomic force microscope cantilever in air. The detection method, based on polarization interferometry, can achieve a resolution of 10-14 m/ √Hz in the frequency range 1-800 kHz. The focused beam from the interferometer probes the cantilever at different positions along its length, and the spatial modes' shapes are determined up to the fourth resonance, without external excitation. Results are in good agreement with theoretically expected behavior. From this analysis accurate determination of the elastic constant of the cantilever is also achieved.",

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AU - Paolino, Pierdomenico

AU - Tiribilli, Bruno

AU - Bellon, Ludovic

PY - 2009/1/1

Y1 - 2009/1/1

N2 - Measurements of the deflection induced by thermal noise have been performed on a rectangular atomic force microscope cantilever in air. The detection method, based on polarization interferometry, can achieve a resolution of 10-14 m/ √Hz in the frequency range 1-800 kHz. The focused beam from the interferometer probes the cantilever at different positions along its length, and the spatial modes' shapes are determined up to the fourth resonance, without external excitation. Results are in good agreement with theoretically expected behavior. From this analysis accurate determination of the elastic constant of the cantilever is also achieved.

AB - Measurements of the deflection induced by thermal noise have been performed on a rectangular atomic force microscope cantilever in air. The detection method, based on polarization interferometry, can achieve a resolution of 10-14 m/ √Hz in the frequency range 1-800 kHz. The focused beam from the interferometer probes the cantilever at different positions along its length, and the spatial modes' shapes are determined up to the fourth resonance, without external excitation. Results are in good agreement with theoretically expected behavior. From this analysis accurate determination of the elastic constant of the cantilever is also achieved.

U2 - 10.1063/1.3245394

DO - 10.1063/1.3245394

M3 - Article

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SN - 0021-8979

VL - 106

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 9

M1 - 094313

ER -

Direct measurement of spatial modes of a microcantilever from thermal noise

Abstract

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