Dynamics of steady and unsteady operation of inductive discharges with attaching gases

P. Chabert; A. J. Lichtenberg; M. A. Lieberman; A. M. Marakhtanov

doi:10.1063/1.1580196

Dynamics of steady and unsteady operation of inductive discharges with attaching gases

P. Chabert, A. J. Lichtenberg, M. A. Lieberman, A. M. Marakhtanov

University of California

Research output: Contribution to journal › Article › peer-review

Abstract

Dynamics of steady and unsteady operation of inductive discharges with attaching gases was studied. An instability can be described by a global model that consists of time-dependent equations for the electrons, ions, and electron temperature. The model qualitatively agrees with experimental observations. The analytic results indicate that the range of unstable behavior with varying power increases as the ratio of wall flux to recombination flux increases.

Original language	English
Pages (from-to)	831-843
Number of pages	13
Journal	Journal of Applied Physics
Volume	94
Issue number	2
DOIs	https://doi.org/10.1063/1.1580196
Publication status	Published - 15 Jul 2003

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title = "Dynamics of steady and unsteady operation of inductive discharges with attaching gases",

abstract = "Dynamics of steady and unsteady operation of inductive discharges with attaching gases was studied. An instability can be described by a global model that consists of time-dependent equations for the electrons, ions, and electron temperature. The model qualitatively agrees with experimental observations. The analytic results indicate that the range of unstable behavior with varying power increases as the ratio of wall flux to recombination flux increases.",

author = "P. Chabert and Lichtenberg, \{A. J.\} and Lieberman, \{M. A.\} and Marakhtanov, \{A. M.\}",

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AU - Chabert, P.

AU - Lichtenberg, A. J.

AU - Lieberman, M. A.

AU - Marakhtanov, A. M.

PY - 2003/7/15

Y1 - 2003/7/15

N2 - Dynamics of steady and unsteady operation of inductive discharges with attaching gases was studied. An instability can be described by a global model that consists of time-dependent equations for the electrons, ions, and electron temperature. The model qualitatively agrees with experimental observations. The analytic results indicate that the range of unstable behavior with varying power increases as the ratio of wall flux to recombination flux increases.

AB - Dynamics of steady and unsteady operation of inductive discharges with attaching gases was studied. An instability can be described by a global model that consists of time-dependent equations for the electrons, ions, and electron temperature. The model qualitatively agrees with experimental observations. The analytic results indicate that the range of unstable behavior with varying power increases as the ratio of wall flux to recombination flux increases.

U2 - 10.1063/1.1580196

DO - 10.1063/1.1580196

M3 - Article

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SN - 0021-8979

VL - 94

SP - 831

EP - 843

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 2

ER -

Dynamics of steady and unsteady operation of inductive discharges with attaching gases

Abstract

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