Abstract
We report measurements of the breakdown curves of a radio-frequency capacitive discharge in low pressure ammonia. The electron drift velocity was determined from the location of turning points in the breakdown curves in the range of E/p = 42-713V cm-1 Torr-1. We compare our results to values calculated from the published cross-sections in the range E/p = 1-5000 V cm-1 Torr-1 and find good agreement.
| Original language | English |
|---|---|
| Pages (from-to) | 872-876 |
| Number of pages | 5 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 38 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 21 Mar 2005 |
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