Euv and hard x-ray hartmann wavefront sensing for optical metrology, alignment and phase imaging

Ombeline de La Rochefoucauld; Guillaume Dovillaire; Fabrice Harms; Mourad Idir; Lei Huang; Xavier Levecq; Martin Piponnier; Philippe Zeitoun

doi:10.3390/s21030874

Euv and hard x-ray hartmann wavefront sensing for optical metrology, alignment and phase imaging

Ombeline de La Rochefoucauld
, Guillaume Dovillaire
, Fabrice Harms
, Mourad Idir
, Lei Huang
, Xavier Levecq
, Martin Piponnier
, Philippe Zeitoun

Research output: Contribution to journal › Article › peer-review

Abstract

For more than 15 years, Imagine Optic have developed Extreme Ultra Violet (EUV) and X-ray Hartmann wavefront sensors for metrology and imaging applications. These sensors are compatible with a wide range of X-ray sources: from synchrotrons, Free Electron Lasers, laser-driven betatron and plasma-based EUV lasers to High Harmonic Generation. In this paper, we first describe the principle of a Hartmann sensor and give some key parameters to design a high-performance sensor. We also present different applications from metrology (for manual or automatic alignment of optics), to soft X-ray source optimization and X-ray imaging.

Original language	English
Article number	874
Pages (from-to)	1-19
Number of pages	19
Journal	Sensors (Switzerland)
Volume	21
Issue number	3
DOIs	https://doi.org/10.3390/s21030874
Publication status	Published - 1 Feb 2021

Keywords

EUV wavefront sensor
Hartmann sensor
Metrology
Phase imaging
X-ray sources
X-ray wavefront sensor

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10.3390/s21030874

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title = "Euv and hard x-ray hartmann wavefront sensing for optical metrology, alignment and phase imaging",

abstract = "For more than 15 years, Imagine Optic have developed Extreme Ultra Violet (EUV) and X-ray Hartmann wavefront sensors for metrology and imaging applications. These sensors are compatible with a wide range of X-ray sources: from synchrotrons, Free Electron Lasers, laser-driven betatron and plasma-based EUV lasers to High Harmonic Generation. In this paper, we first describe the principle of a Hartmann sensor and give some key parameters to design a high-performance sensor. We also present different applications from metrology (for manual or automatic alignment of optics), to soft X-ray source optimization and X-ray imaging.",

keywords = "EUV wavefront sensor, Hartmann sensor, Metrology, Phase imaging, X-ray sources, X-ray wavefront sensor",

author = "\{de La Rochefoucauld\}, Ombeline and Guillaume Dovillaire and Fabrice Harms and Mourad Idir and Lei Huang and Xavier Levecq and Martin Piponnier and Philippe Zeitoun",

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AU - de La Rochefoucauld, Ombeline

AU - Dovillaire, Guillaume

AU - Harms, Fabrice

AU - Idir, Mourad

AU - Huang, Lei

AU - Levecq, Xavier

AU - Piponnier, Martin

AU - Zeitoun, Philippe

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KW - EUV wavefront sensor

KW - Hartmann sensor

KW - Metrology

KW - Phase imaging

KW - X-ray sources

KW - X-ray wavefront sensor

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M3 - Article

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AN - SCOPUS:85099884726

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JO - Sensors (Switzerland)

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ER -

Euv and hard x-ray hartmann wavefront sensing for optical metrology, alignment and phase imaging

Abstract

Keywords

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