Evidence of bimodal crystallite size distribution in μc-Si:H films

Sanjay K. Ram; Md Nazrul Islam; Satyendra Kumar; P. Roca i Cabarrocas

doi:10.1016/j.mseb.2008.11.048

Evidence of bimodal crystallite size distribution in μc-Si:H films

Sanjay K. Ram
, Md Nazrul Islam
, Satyendra Kumar
, P. Roca i Cabarrocas

Institut polytechnique de Paris
Indian Institute of Technology Kanpur
Indian Space Research Organisation

Research output: Contribution to journal › Article › peer-review

Abstract

We report on the microstructural characterization studies carried out on plasma deposited highly crystalline undoped microcrystalline silicon films to explore the crystallite size distribution present in this material. The modeling of results of spectroscopic ellipsometry using two different sized crystallites is corroborated by the deconvolution of experimental Raman profiles using a modeling method that incorporates a bimodal size distribution of crystallites. The presence of a bimodal size distribution of crystallites is demonstrated as well by the results of atomic force microscopy and X-ray diffraction studies. The qualitative agreement between the results of different studies is discussed.

Original language	English
Pages (from-to)	34-37
Number of pages	4
Journal	Materials Science and Engineering: B
Volume	159-160
Issue number	C
DOIs	https://doi.org/10.1016/j.mseb.2008.11.048
Publication status	Published - 15 Mar 2009

Keywords

Atomic force microscopy (AFM)
Ellipsometry
Raman spectroscopy
Silicon
Structural properties
Thin films

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10.1016/j.mseb.2008.11.048

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title = "Evidence of bimodal crystallite size distribution in μc-Si:H films",

abstract = "We report on the microstructural characterization studies carried out on plasma deposited highly crystalline undoped microcrystalline silicon films to explore the crystallite size distribution present in this material. The modeling of results of spectroscopic ellipsometry using two different sized crystallites is corroborated by the deconvolution of experimental Raman profiles using a modeling method that incorporates a bimodal size distribution of crystallites. The presence of a bimodal size distribution of crystallites is demonstrated as well by the results of atomic force microscopy and X-ray diffraction studies. The qualitative agreement between the results of different studies is discussed.",

keywords = "Atomic force microscopy (AFM), Ellipsometry, Raman spectroscopy, Silicon, Structural properties, Thin films",

author = "Ram, \{Sanjay K.\} and Islam, \{Md Nazrul\} and Satyendra Kumar and \{Roca i Cabarrocas\}, P.",

year = "2009",

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doi = "10.1016/j.mseb.2008.11.048",

language = "English",

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T1 - Evidence of bimodal crystallite size distribution in μc-Si:H films

AU - Ram, Sanjay K.

AU - Islam, Md Nazrul

AU - Kumar, Satyendra

AU - Roca i Cabarrocas, P.

PY - 2009/3/15

Y1 - 2009/3/15

N2 - We report on the microstructural characterization studies carried out on plasma deposited highly crystalline undoped microcrystalline silicon films to explore the crystallite size distribution present in this material. The modeling of results of spectroscopic ellipsometry using two different sized crystallites is corroborated by the deconvolution of experimental Raman profiles using a modeling method that incorporates a bimodal size distribution of crystallites. The presence of a bimodal size distribution of crystallites is demonstrated as well by the results of atomic force microscopy and X-ray diffraction studies. The qualitative agreement between the results of different studies is discussed.

AB - We report on the microstructural characterization studies carried out on plasma deposited highly crystalline undoped microcrystalline silicon films to explore the crystallite size distribution present in this material. The modeling of results of spectroscopic ellipsometry using two different sized crystallites is corroborated by the deconvolution of experimental Raman profiles using a modeling method that incorporates a bimodal size distribution of crystallites. The presence of a bimodal size distribution of crystallites is demonstrated as well by the results of atomic force microscopy and X-ray diffraction studies. The qualitative agreement between the results of different studies is discussed.

KW - Atomic force microscopy (AFM)

KW - Ellipsometry

KW - Raman spectroscopy

KW - Silicon

KW - Structural properties

KW - Thin films

UR - https://www.scopus.com/pages/publications/67349240399

U2 - 10.1016/j.mseb.2008.11.048

DO - 10.1016/j.mseb.2008.11.048

M3 - Article

AN - SCOPUS:67349240399

SN - 0921-5107

VL - 159-160

SP - 34

EP - 37

JO - Materials Science and Engineering: B

JF - Materials Science and Engineering: B

IS - C

ER -

Evidence of bimodal crystallite size distribution in μc-Si:H films

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Keywords

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