Experimental Evidence of Mechanical Frequency Comb in a Quad-Mass Mems Structure

  • Giorgio Gobat
  • , Valentina Zega
  • , Patrick Fedeli
  • , Luca G. Falorni
  • , Luca Guerinoni
  • , Cyril Touze
  • , Attilio Frangi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Challenging applications and the increasing request of higher performances of MEMS devices are focusing the attention of the MEMS community on the understanding and modelling of complex dynamic phenomena. In this work, we experimentally detect a mechanical frequency comb arising in a quad-mass MEMS structure electrostatically actuated through comb fingers electrodes and we propose a simplified model able to predict such nonlinear dynamic behaviour. In particular, we hypothesize a 1:3 internal resonance between two in-plane modes of the structure and exhibit the presence of a Neimark-Sacker bifurcation responsible of frequency comb phenomena.

Original languageEnglish
Title of host publication34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages615-618
Number of pages4
ISBN (Electronic)9781665419123
DOIs
Publication statusPublished - 25 Jan 2021
Externally publishedYes
Event34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
Duration: 25 Jan 202129 Jan 2021

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2021-January
ISSN (Print)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Country/TerritoryUnited States
CityVirtual, Gainesville
Period25/01/2129/01/21

Keywords

  • Bifurcation
  • Frequency Comb
  • Modelling
  • Nonlinearities

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