Abstract
We report in this paper simulation results and experimental measurements to characterize a micro-discharge generated in a single micro cavity device operating in helium. By spatially limiting the cathode surface area using a dielectric layer, we demonstrate the ability of the micro-discharge to work in a steady-state abnormal glow regime. The physical properties of this regime are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 565-574 |
| Number of pages | 10 |
| Journal | European Physical Journal D |
| Volume | 60 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 1 Jan 2010 |
| Externally published | Yes |