Experimental study and simulation of a micro-discharge with limited cathode area

  • T. Dufour
  • , L. J. Overzet
  • , R. Dussart
  • , L. C. Pitchford
  • , N. Sadeghi
  • , P. Lefaucheux
  • , M. Kulsreshath
  • , P. Ranson

Research output: Contribution to journalArticlepeer-review

Abstract

We report in this paper simulation results and experimental measurements to characterize a micro-discharge generated in a single micro cavity device operating in helium. By spatially limiting the cathode surface area using a dielectric layer, we demonstrate the ability of the micro-discharge to work in a steady-state abnormal glow regime. The physical properties of this regime are discussed.

Original languageEnglish
Pages (from-to)565-574
Number of pages10
JournalEuropean Physical Journal D
Volume60
Issue number3
DOIs
Publication statusPublished - 1 Jan 2010
Externally publishedYes

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