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Fabrication and characterization of low loss photonic crystal waveguides based on InP substrate

  • G. H. Duan
  • , C. Cuisin
  • , E. Dernuin
  • , O. Drisse
  • , L. Legouezigou
  • , O. Legouezigou
  • , F. Pommereau
  • , Y. Gottesman
  • , E. V.K. Rao
  • , B. Wild
  • , R. Houdre
  • Alcatel Research and Innovation
  • CNRS SAMOVAR UMR 5157
  • Centre de Nanosciences et de Nanotechnologies
  • Institut de Photonique et d'Electronique Quantique
  • ENAC-IIC-GEL

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Photonic crystal waveguides, fabricated on InP substrate using an inductively coupled plasma etching process, show propagation losses of 40dB/mm with one missing row and of less than 10 dB/mm with three missing rows.

Original languageEnglish
Title of host publicationOptical Fiber Communication Conference, OFC 2006
PublisherOptical Society of America
ISBN (Print)1557528020, 9781557528025
Publication statusPublished - 1 Jan 2006
Externally publishedYes
EventOptical Fiber Communication Conference, OFC 2006 - Anaheim, CA, United States
Duration: 5 Mar 20065 Mar 2006

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Fiber Communication Conference, OFC 2006
Country/TerritoryUnited States
CityAnaheim, CA
Period5/03/065/03/06

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