Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds

Andrea Opreni, Alessandra Vizzaccaro, Nicolo Boni, Roberto Carminati, Gianluca Mendicino, Cyril Touze, Attilio Frangi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance.

Original languageEnglish
Title of host publication35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages491-494
Number of pages4
ISBN (Electronic)9781665409117
DOIs
Publication statusPublished - 1 Jan 2022
Event35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 9 Jan 202213 Jan 2022

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2022-January
ISSN (Print)1084-6999

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/TerritoryJapan
CityTokyo
Period9/01/2213/01/22

Keywords

  • Invariant Manifold
  • Micromirrors
  • Model Order Reduction
  • Piezoelectric

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