@inproceedings{36ee34b5133f47d5b5926fc65b78bf94,
title = "Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds",
abstract = "The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance.",
keywords = "Invariant Manifold, Micromirrors, Model Order Reduction, Piezoelectric",
author = "Andrea Opreni and Alessandra Vizzaccaro and Nicolo Boni and Roberto Carminati and Gianluca Mendicino and Cyril Touze and Attilio Frangi",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",
year = "2022",
month = jan,
day = "1",
doi = "10.1109/MEMS51670.2022.9699545",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "491--494",
booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",
}