Femtosecond laser micro and nano processing with nondiffracting Bessel and accelerating Airy beams

F. Courvoisier; A. Mathis; J. Zhang; L. Froehly; V. Jukna; L. Furfaro; M. Jacquot; R. Giust; P. A. Lacourt; A. Couairon; J. M. Dudley

doi:10.1109/CLEOE-IQEC.2013.6801555

Femtosecond laser micro and nano processing with nondiffracting Bessel and accelerating Airy beams

F. Courvoisier, A. Mathis, J. Zhang, L. Froehly, V. Jukna, L. Furfaro, M. Jacquot, R. Giust, P. A. Lacourt, A. Couairon, J. M. Dudley

Research output: Contribution to conference › Paper › peer-review

Abstract

Femtosecond laser micro and nano-processing is a versatile material processing tool which has opened up a broad range of technologies and applications. However, in the particular context of the fabrication of deep trenches and channels, precise control of profile of the ablated structure is extremely challenging. We have recently developed a novel approach to fabricate controlled high aspect structures using novel Bessel and Airy beams, and this contribution will review our recent work in this field.

Original language	English
DOIs	https://doi.org/10.1109/CLEOE-IQEC.2013.6801555
Publication status	Published - 1 Jan 2013
Event	2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 - Munich, Germany Duration: 12 May 2013 → 16 May 2013

Conference

Conference	2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013
Country/Territory	Germany
City	Munich
Period	12/05/13 → 16/05/13

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10.1109/CLEOE-IQEC.2013.6801555

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Courvoisier, F., Mathis, A., Zhang, J., Froehly, L., Jukna, V., Furfaro, L., Jacquot, M., Giust, R., Lacourt, P. A., Couairon, A., & Dudley, J. M. (2013). Femtosecond laser micro and nano processing with nondiffracting Bessel and accelerating Airy beams. Paper presented at 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013, Munich, Germany. https://doi.org/10.1109/CLEOE-IQEC.2013.6801555

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title = "Femtosecond laser micro and nano processing with nondiffracting Bessel and accelerating Airy beams",

abstract = "Femtosecond laser micro and nano-processing is a versatile material processing tool which has opened up a broad range of technologies and applications. However, in the particular context of the fabrication of deep trenches and channels, precise control of profile of the ablated structure is extremely challenging. We have recently developed a novel approach to fabricate controlled high aspect structures using novel Bessel and Airy beams, and this contribution will review our recent work in this field.",

author = "F. Courvoisier and A. Mathis and J. Zhang and L. Froehly and V. Jukna and L. Furfaro and M. Jacquot and R. Giust and Lacourt, \{P. A.\} and A. Couairon and Dudley, \{J. M.\}",

year = "2013",

month = jan,

day = "1",

doi = "10.1109/CLEOE-IQEC.2013.6801555",

language = "English",

note = "2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 ; Conference date: 12-05-2013 Through 16-05-2013",

}

Courvoisier, F, Mathis, A, Zhang, J, Froehly, L, Jukna, V, Furfaro, L, Jacquot, M, Giust, R, Lacourt, PA, Couairon, A & Dudley, JM 2013, 'Femtosecond laser micro and nano processing with nondiffracting Bessel and accelerating Airy beams', Paper presented at 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013, Munich, Germany, 12/05/13 - 16/05/13. https://doi.org/10.1109/CLEOE-IQEC.2013.6801555

Femtosecond laser micro and nano processing with nondiffracting Bessel and accelerating Airy beams. / Courvoisier, F.; Mathis, A.; Zhang, J. et al.
2013. Paper presented at 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013, Munich, Germany.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Femtosecond laser micro and nano processing with nondiffracting Bessel and accelerating Airy beams

AU - Courvoisier, F.

AU - Mathis, A.

AU - Zhang, J.

AU - Froehly, L.

AU - Jukna, V.

AU - Furfaro, L.

AU - Jacquot, M.

AU - Giust, R.

AU - Lacourt, P. A.

AU - Couairon, A.

AU - Dudley, J. M.

PY - 2013/1/1

Y1 - 2013/1/1

N2 - Femtosecond laser micro and nano-processing is a versatile material processing tool which has opened up a broad range of technologies and applications. However, in the particular context of the fabrication of deep trenches and channels, precise control of profile of the ablated structure is extremely challenging. We have recently developed a novel approach to fabricate controlled high aspect structures using novel Bessel and Airy beams, and this contribution will review our recent work in this field.

AB - Femtosecond laser micro and nano-processing is a versatile material processing tool which has opened up a broad range of technologies and applications. However, in the particular context of the fabrication of deep trenches and channels, precise control of profile of the ablated structure is extremely challenging. We have recently developed a novel approach to fabricate controlled high aspect structures using novel Bessel and Airy beams, and this contribution will review our recent work in this field.

U2 - 10.1109/CLEOE-IQEC.2013.6801555

DO - 10.1109/CLEOE-IQEC.2013.6801555

M3 - Paper

AN - SCOPUS:84900316664

T2 - 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013

Y2 - 12 May 2013 through 16 May 2013

ER -

Courvoisier F, Mathis A, Zhang J, Froehly L, Jukna V, Furfaro L et al.. Femtosecond laser micro and nano processing with nondiffracting Bessel and accelerating Airy beams. 2013. Paper presented at 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013, Munich, Germany. doi: 10.1109/CLEOE-IQEC.2013.6801555

Femtosecond laser micro and nano processing with nondiffracting Bessel and accelerating Airy beams

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