FIB Design for Nanofluidic Applications

R. Fulcrand; N. P. Blanchard; A. L. Biance; A. Siria; P. Poncharal; L. Bocquet

doi:10.1007/978-3-319-02874-3_15

FIB Design for Nanofluidic Applications

R. Fulcrand
, N. P. Blanchard
, A. L. Biance
, A. Siria
, P. Poncharal
, L. Bocquet

IGFL, Université de Lyon, Université Lyon 1
Massachusetts Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

In this chapter we briefly review the techniques available to researchers in the nanofluidic domain to fabricate nanopores and nanochannels. In this context the focused ion beam (FIB) technique will be introduced as a useful and versatile tool for nanofluidics. We illustrate it with two specific examples involving nanopores as building blocks for nanofluidics.

Original language	English
Title of host publication	Lecture Notes in Nanoscale Science and Technology
Publisher	Springer Publishing Company
Pages	373-389
Number of pages	17
DOIs	https://doi.org/10.1007/978-3-319-02874-3_15
Publication status	Published - 1 Jan 2013
Externally published	Yes

Publication series

Name	Lecture Notes in Nanoscale Science and Technology
Volume	20
ISSN (Print)	2195-2159
ISSN (Electronic)	2195-2167

Keywords

Nanofluidic
nano-patterning
nanopore
nanotube

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10.1007/978-3-319-02874-3_15

Cite this

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AU - Fulcrand, R.

AU - Blanchard, N. P.

AU - Biance, A. L.

AU - Siria, A.

AU - Poncharal, P.

AU - Bocquet, L.

N1 - Publisher Copyright: © Springer International Publishing Switzerland 2013.

PY - 2013/1/1

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KW - Nanofluidic

KW - nano-patterning

KW - nanopore

KW - nanotube

UR - https://www.scopus.com/pages/publications/105035516967

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ER -

FIB Design for Nanofluidic Applications

Abstract

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