Fine-structure-resolved electron collisions from chlorine atoms in the ⁽3p5⁾2P3/2o and ⁽3p5⁾2P1/2o states

The B-spline R-matrix method is employed to calculate elastic electron scattering from chlorine atoms in the (3p5)2P3/2,1/2o states and electron-induced collisions between these two finestructure levels. The polarizability of the target states is accounted for by including polarized pseudostates in the close-coupling expansion, while relativistic effects are treated at the level of the semirelativistic Breit-Pauli approximation. We find the Ramsauer minimum in the elastic channels at a significantly lower projectile energy (≈0.2 eV) than previous calculations, due to an apparent strong sensitivity of the theoretical predictions on the details of the model, especially the target structure. The present results are relevant to the determination of chlorine atomic densities in Cl₂-containing industrial plasma etch reactors.