Flexible organic-inorganic hybrid layer encapsulation for organic opto-electronic devices

  • Subimal Majee
  • , Maria Fátima Cerqueira
  • , Denis Tondelier
  • , Bernard Geffroy
  • , Yvan Bonnassieux
  • , Pedro Alpuim
  • , Jean Eric Bourée

Research output: Contribution to journalArticlepeer-review

Abstract

In this work we produce and study the flexible organic-inorganic hybrid moisture barrier layers for the protection of air sensitive organic opto-electronic devices. The inorganic amorphous silicon nitride layer (SiNx:H) and the organic PMMA [poly (methyl methacrylate)] layer are deposited alternatingly by using hot wire chemical vapor deposition (HW-CVD) and spin-coating techniques, respectively. The effect of organic-inorganic hybrid interfaces is analyzed for increasing number of interfaces. We produce highly transparent (∼80% in the visible region) hybrid structures. The morphological properties are analyzed providing a good basis for understanding the variation of the water vapor transmission rate (WVTR) values. A minimum WVTR of 4.5 × 10-5 g/m2 day is reported at the ambient atmospheric conditions for 7 organic/inorganic interfaces. The hybrid barriers show superb mechanical flexibility which confirms their high potential for flexible applications.

Original languageEnglish
Pages (from-to)27-32
Number of pages6
JournalProgress in Organic Coatings
Volume80
DOIs
Publication statusPublished - 1 Mar 2015

Keywords

  • HW-CVD
  • Organic electronics
  • PMMA
  • Permeation barrier
  • Silicon nitride

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