Gettering efficiencies of Σ=25, Σ=13 and Σ=9 silicon bicrystals

A. Ihlal, O. B.M. Hardouin Duparc, R. Rizk

Research output: Contribution to journalArticlepeer-review

Abstract

The gettering efficiencies of Σ=25, Σ=13 and Σ=9 grain boundaries (GBs) have been studied by means of EBIC measurements on quenched silicon bicrystals precontaminated by Cu or Ni. The gettering " strength " of each GB has been correlated to the appearance and extent of a denuded zone (DZ) on either side of the GB. For both contaminants, the same scaling of the gettering efficiencies, namely Σ=9≪Σ=13<Σ=25, has been observed. In order to account for this ranking, theoretical calculations of the GB structures and related free energies have been performed by means of molecular dynamics simulations using several potentials These calculations provided the same progression for the interfacial energies, which was found to be quite consistent with the experimental data.

Original languageEnglish
Pages (from-to)621-624
Number of pages4
JournalMaterials Science Forum
Volume207-209
Issue numberPART 2
Publication statusPublished - 1 Jan 1996

Keywords

  • Boundary Energy
  • Denuded Zone
  • EBIC
  • Gettering
  • Grain Boundary
  • Molecular Dynamics
  • Precipitate
  • Silicide
  • Silicon Bicrystal

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