Abstract
We compare the 3D Monte-Carlo simulations of atom aggregation on a surface with TEM micrographs of real cobalt deposits obtained by sputter deposition on amorphous alumina. The discrepancy between deposited masses in otherwise similar calculated and real deposits suggests the existence of a layer of trapped cobalt atoms in the latter.
| Original language | English |
|---|---|
| Pages (from-to) | 48-51 |
| Number of pages | 4 |
| Journal | Applied Surface Science |
| Volume | 164 |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - 1 Jan 2000 |
| Externally published | Yes |
Keywords
- Alumina
- Cobalt
- Monte-Carlo simulations