High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range

Lu Li; Jayanath C.P. Koliyadu; Hannah Donnelly; Domenico Alj; Olivier Delmas; Mabel Ruiz-Lopez; Ombeline de la Rochefoucauld; Guillaume Dovillaire; Marta Fajardo; Cangtao Zhou; Shuangchen Ruan; Brendan Dromey; Matt Zepf; Philippe Zeitoun

doi:10.1364/OL.396356

High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range

Lu Li
, Jayanath C.P. Koliyadu
, Hannah Donnelly
, Domenico Alj
, Olivier Delmas
, Mabel Ruiz-Lopez
, Ombeline de la Rochefoucauld
, Guillaume Dovillaire
, Marta Fajardo
, Cangtao Zhou
, Shuangchen Ruan
, Brendan Dromey
, Matt Zepf
, Philippe Zeitoun

Research output: Contribution to journal › Article › peer-review

Abstract

We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond λ/39 root mean square (rms) at λ = 32 nm. The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.

Original language	English
Pages (from-to)	4248-4251
Number of pages	4
Journal	Optics Letters
Volume	45
Issue number	15
DOIs	https://doi.org/10.1364/OL.396356
Publication status	Published - 1 Aug 2020

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10.1364/OL.396356

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title = "High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range",

abstract = "We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond λ/39 root mean square (rms) at λ = 32 nm. The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.",

author = "Lu Li and Koliyadu, \{Jayanath C.P.\} and Hannah Donnelly and Domenico Alj and Olivier Delmas and Mabel Ruiz-Lopez and \{de la Rochefoucauld\}, Ombeline and Guillaume Dovillaire and Marta Fajardo and Cangtao Zhou and Shuangchen Ruan and Brendan Dromey and Matt Zepf and Philippe Zeitoun",

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doi = "10.1364/OL.396356",

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T1 - High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range

AU - Li, Lu

AU - Koliyadu, Jayanath C.P.

AU - Donnelly, Hannah

AU - Alj, Domenico

AU - Delmas, Olivier

AU - Ruiz-Lopez, Mabel

AU - de la Rochefoucauld, Ombeline

AU - Dovillaire, Guillaume

AU - Fajardo, Marta

AU - Zhou, Cangtao

AU - Ruan, Shuangchen

AU - Dromey, Brendan

AU - Zepf, Matt

AU - Zeitoun, Philippe

PY - 2020/8/1

Y1 - 2020/8/1

N2 - We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond λ/39 root mean square (rms) at λ = 32 nm. The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.

AB - We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond λ/39 root mean square (rms) at λ = 32 nm. The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.

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VL - 45

SP - 4248

EP - 4251

JO - Optics Letters

JF - Optics Letters

IS - 15

ER -

High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range

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