High- Q whispering-gallery modes in GaAsAlOx microdisks

E. Peter; I. Sagnes; G. Guirleo; S. Varoutsis; J. Bloch; A. Lemàtre; P. Senellart

doi:10.1063/1.1844033

High- Q whispering-gallery modes in GaAsAlOx microdisks

E. Peter
, I. Sagnes
, G. Guirleo
, S. Varoutsis
, J. Bloch
, A. Lemàtre
, P. Senellart

CNRS-Lab. de Photonique et N.

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

We report on the fabrication of microdisks on an AlOx pedestal. We develop a process using electron beam lithography, a chemical etching, and selective oxidation. InAs self-assembled quantum dots are used as a broad band source to probe the optical modes of the microdisks. With this process, we observe whispering-gallery modes, with quality factors as large as 12 500 for 2-μm-diam microdisks.

Original language	English
Article number	021103
Pages (from-to)	021103-1-021103-3
Journal	Applied Physics Letters
Volume	86
Issue number	2
DOIs	https://doi.org/10.1063/1.1844033
Publication status	Published - 10 Jan 2005
Externally published	Yes

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abstract = "We report on the fabrication of microdisks on an AlOx pedestal. We develop a process using electron beam lithography, a chemical etching, and selective oxidation. InAs self-assembled quantum dots are used as a broad band source to probe the optical modes of the microdisks. With this process, we observe whispering-gallery modes, with quality factors as large as 12 500 for 2-μm-diam microdisks.",

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AU - Peter, E.

AU - Sagnes, I.

AU - Guirleo, G.

AU - Varoutsis, S.

AU - Bloch, J.

AU - Lemàtre, A.

AU - Senellart, P.

PY - 2005/1/10

Y1 - 2005/1/10

N2 - We report on the fabrication of microdisks on an AlOx pedestal. We develop a process using electron beam lithography, a chemical etching, and selective oxidation. InAs self-assembled quantum dots are used as a broad band source to probe the optical modes of the microdisks. With this process, we observe whispering-gallery modes, with quality factors as large as 12 500 for 2-μm-diam microdisks.

AB - We report on the fabrication of microdisks on an AlOx pedestal. We develop a process using electron beam lithography, a chemical etching, and selective oxidation. InAs self-assembled quantum dots are used as a broad band source to probe the optical modes of the microdisks. With this process, we observe whispering-gallery modes, with quality factors as large as 12 500 for 2-μm-diam microdisks.

U2 - 10.1063/1.1844033

DO - 10.1063/1.1844033

M3 - Article

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SN - 0003-6951

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JO - Applied Physics Letters

JF - Applied Physics Letters

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High- Q whispering-gallery modes in GaAsAlOx microdisks

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