Abstract
We describe how the transmission electron microscope may be used to obtain composition profiles of materials with atomic layer spatial resolution and high chemical sensitivity. Two approaches are outlined. Chemical mapping is applicable to chemically ordered solids, in which compositional changes occur on a subset of lattice sites. Such materials produce chemical reflections, which may be used to measure the composition with near‐atomic sensitivity. QUANTITEM is applicable to chemically disordered materials, with no chemical reflections. This approach maps thickness changes in samples of uniform composition, and compositional changes in inhomogeneous materials. The discussion is qualitative to avoid mathematical complexity, and is illustrated by representative examples.
| Original language | English |
|---|---|
| Pages (from-to) | 31-50 |
| Number of pages | 20 |
| Journal | physica status solidi (a) |
| Volume | 150 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1 Jan 1995 |
| Externally published | Yes |