Abstract
An interferometric method is implemented in order to accurately assess the thermal fluctuations of a micro-cantilever sensor in liquid environments. The power spectrum density (PSD) of thermal fluctuations together with Sader’s model of the cantilever allow for the indirect measurement of the liquid viscosity with good accuracy. The good quality of the deflection signal and the characteristic low noise of the instrument allow for the detection and corrections of drawbacks due to both the cantilever shape irregularities and the uncertainties on the position of the laser spot at the fluctuating end of the cantilever. Variation of viscosity below 0:03mPa s was detected with the alternative to achieve measurements with a volume as low as 50 μL.
| Original language | English |
|---|---|
| Pages (from-to) | 27905-27916 |
| Number of pages | 12 |
| Journal | Sensors (Switzerland) |
| Volume | 15 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 3 Nov 2015 |
| Externally published | Yes |
Keywords
- MEMS
- Thermal fluctuations
- Viscosity in liquids
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