Abstract
We present a characterization technique of wide-area sub-wavelength structures. The optical bench is based on lateral shearing interferometry, which allows an accurate complex transmittance (phase and amplitude) measurement. The experimental validation is made in the long-wavelength infrared domain; more precisely we work in the integrated 8-9 μm spectral range. Measurements of the transmitted amplitude and phase shift reveal a good agreement with respectively experimental results based on Fourier Transform infrared spectrometry, and theoretical simulations.
| Original language | English |
|---|---|
| Pages (from-to) | 7060-7070 |
| Number of pages | 11 |
| Journal | Optics Express |
| Volume | 16 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 12 May 2008 |
| Externally published | Yes |
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