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Holistic characterization of complex transmittances generated by infrared sub-wavelength gratings

  • Bruno Toulon
  • , Grégory Vincent
  • , Riad Haïdar
  • , Nicolas Guérineau
  • , Stéphane Collin
  • , Jean Luc Pelouard
  • , Jérôme Primot

Research output: Contribution to journalArticlepeer-review

Abstract

We present a characterization technique of wide-area sub-wavelength structures. The optical bench is based on lateral shearing interferometry, which allows an accurate complex transmittance (phase and amplitude) measurement. The experimental validation is made in the long-wavelength infrared domain; more precisely we work in the integrated 8-9 μm spectral range. Measurements of the transmitted amplitude and phase shift reveal a good agreement with respectively experimental results based on Fourier Transform infrared spectrometry, and theoretical simulations.

Original languageEnglish
Pages (from-to)7060-7070
Number of pages11
JournalOptics Express
Volume16
Issue number10
DOIs
Publication statusPublished - 12 May 2008
Externally publishedYes

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