@inproceedings{2a322f7dedde4f409a658cd11c4d2e90,
title = "Hybrid kinetic/fluid modeling of silicon nanoparticles dynamics in silane plasma discharges",
abstract = "We present a fully coupled self-consistent model for the evolution of nanoparticles in a plasma-enhanced chemical vapor deposition (PECVD) reactor. The plasma is treated as a fluid while the nanoparticles are handled kinetically. The plasma fluid model is derived from kinetic theory applied to multicomponent two-temperature chemically reactive polyatomic plasmas. The model has been implemented numerically for a silane-hydrogen plasma in the early stage of nanoparticles generation.",
author = "Orlac'H, \{J. M.\} and V. Giovangigli and T. Novikova and P. RocaCabarrocas",
year = "2016",
month = nov,
day = "15",
doi = "10.1063/1.4967630",
language = "English",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
editor = "Henning Struchtrup and Andrew Ketsdever",
booktitle = "30th International Symposium on Rarefied Gas Dynamics, RGD 2016",
note = "30th International Symposium on Rarefied Gas Dynamics, RGD 2016 ; Conference date: 10-07-2016 Through 15-07-2016",
}