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Imagerie tomographique et topographique par microscopie interférentielle

Translated title of the contribution: Tomographic and topographic images using an interference microscope

Research output: Contribution to journalArticlepeer-review

Abstract

An interference microscope using a low coherence source, based on a Michelson interferometer, is coupled with a CCD camera acquiring interference images at high frequency. Using a parallel lock-in detection on all the pixels of the CCD array, we obtain intensity images (tomographic images) or phase images (proportional to the topography) of the observed object.

Translated title of the contributionTomographic and topographic images using an interference microscope
Original languageFrench
Pages (from-to)45-47
Number of pages3
JournalREE, Revue de L'Electricite et de L'Electronique
Issue number1
DOIs
Publication statusPublished - 1 Jan 2001
Externally publishedYes

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