Abstract
We present single shot nanoscale imaging using a table-top femtosecond soft X-ray laser harmonic source at a wavelength of 32 nm. We show that the phase retrieval process in coherent diffractive imaging critically depends on beam quality. Coherence and image fidelity are measured from single-shot coherent diffraction patterns of isolated nano-patterned slits. Impact of flux, wave front and coherence of the soft X-ray beam on the phase retrieval process and the image quality are discussed. After beam improvements, a final image reconstruction is presented with a spatial resolution of 78 nm (half period) in a single 20 fs laser harmonic shot.
| Original language | English |
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| Pages (from-to) | 11441-11447 |
| Number of pages | 7 |
| Journal | Optics Express |
| Volume | 21 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 6 May 2013 |