Influence of the Electron Beam and the Choice of Heating Membrane on the Evolution of Si Nanowires’ Morphology in In Situ TEM

Ya Shen; Xuechun Zhao; Ruiling Gong; Eric Ngo; Jean Luc Maurice; Pere Roca i Cabarrocas; Wanghua Chen

doi:10.3390/ma15155244

Influence of the Electron Beam and the Choice of Heating Membrane on the Evolution of Si Nanowires’ Morphology in In Situ TEM

Ya Shen
, Xuechun Zhao
, Ruiling Gong
, Eric Ngo
, Jean Luc Maurice
, Pere Roca i Cabarrocas
, Wanghua Chen

Ningbo University

Research output: Contribution to journal › Article › peer-review

Abstract

We used in situ transmission electron microscopy (TEM) to observe the dynamic changes of Si nanowires under electron beam irradiation. We found evidence of structural evolutions under TEM observation due to a combination of electron beam and thermal effects. Two types of heating holders were used: a carbon membrane, and a silicon nitride membrane. Different evolution of Si nanowires on these membranes was observed. Regarding the heating of Si nanowires on a C membrane at 800 °C and above, a serious degradation dependent on the diameter of the Si nanowire was observed under the electron beam, with the formation of Si carbide. When the membrane was changed to Si nitride, a reversible sectioning and welding of the Si nanowire was observed.

Original language	English
Article number	5244
Journal	Materials
Volume	15
Issue number	15
DOIs	https://doi.org/10.3390/ma15155244
Publication status	Published - 1 Aug 2022

Keywords

TEM
electron beam irradiation
growth
silicon nanowire

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10.3390/ma15155244

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title = "Influence of the Electron Beam and the Choice of Heating Membrane on the Evolution of Si Nanowires{\textquoteright} Morphology in In Situ TEM",

abstract = "We used in situ transmission electron microscopy (TEM) to observe the dynamic changes of Si nanowires under electron beam irradiation. We found evidence of structural evolutions under TEM observation due to a combination of electron beam and thermal effects. Two types of heating holders were used: a carbon membrane, and a silicon nitride membrane. Different evolution of Si nanowires on these membranes was observed. Regarding the heating of Si nanowires on a C membrane at 800 °C and above, a serious degradation dependent on the diameter of the Si nanowire was observed under the electron beam, with the formation of Si carbide. When the membrane was changed to Si nitride, a reversible sectioning and welding of the Si nanowire was observed.",

keywords = "TEM, electron beam irradiation, growth, silicon nanowire",

author = "Ya Shen and Xuechun Zhao and Ruiling Gong and Eric Ngo and Maurice, \{Jean Luc\} and \{Roca i Cabarrocas\}, Pere and Wanghua Chen",

note = "Publisher Copyright: {\textcopyright} 2022 by the authors.",

year = "2022",

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doi = "10.3390/ma15155244",

language = "English",

volume = "15",

journal = "Materials",

issn = "1996-1944",

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TY - JOUR

T1 - Influence of the Electron Beam and the Choice of Heating Membrane on the Evolution of Si Nanowires’ Morphology in In Situ TEM

AU - Shen, Ya

AU - Zhao, Xuechun

AU - Gong, Ruiling

AU - Ngo, Eric

AU - Maurice, Jean Luc

AU - Roca i Cabarrocas, Pere

AU - Chen, Wanghua

PY - 2022/8/1

Y1 - 2022/8/1

N2 - We used in situ transmission electron microscopy (TEM) to observe the dynamic changes of Si nanowires under electron beam irradiation. We found evidence of structural evolutions under TEM observation due to a combination of electron beam and thermal effects. Two types of heating holders were used: a carbon membrane, and a silicon nitride membrane. Different evolution of Si nanowires on these membranes was observed. Regarding the heating of Si nanowires on a C membrane at 800 °C and above, a serious degradation dependent on the diameter of the Si nanowire was observed under the electron beam, with the formation of Si carbide. When the membrane was changed to Si nitride, a reversible sectioning and welding of the Si nanowire was observed.

AB - We used in situ transmission electron microscopy (TEM) to observe the dynamic changes of Si nanowires under electron beam irradiation. We found evidence of structural evolutions under TEM observation due to a combination of electron beam and thermal effects. Two types of heating holders were used: a carbon membrane, and a silicon nitride membrane. Different evolution of Si nanowires on these membranes was observed. Regarding the heating of Si nanowires on a C membrane at 800 °C and above, a serious degradation dependent on the diameter of the Si nanowire was observed under the electron beam, with the formation of Si carbide. When the membrane was changed to Si nitride, a reversible sectioning and welding of the Si nanowire was observed.

KW - TEM

KW - electron beam irradiation

KW - growth

KW - silicon nanowire

U2 - 10.3390/ma15155244

DO - 10.3390/ma15155244

M3 - Article

AN - SCOPUS:85137149254

SN - 1996-1944

VL - 15

JO - Materials

JF - Materials

IS - 15

M1 - 5244

ER -

Influence of the Electron Beam and the Choice of Heating Membrane on the Evolution of Si Nanowires’ Morphology in In Situ TEM

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Keywords

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