Interface effects on the moisture barrier properties of SiNx/PMMA/SiNx hybrid structure

Subimal Majee; Bernard Geffroy; Yvan Bonnassieux; Jean Eric Bourée

doi:10.1016/j.surfcoat.2014.06.059

Interface effects on the moisture barrier properties of SiN_x/PMMA/SiN_x hybrid structure

Subimal Majee
, Bernard Geffroy
, Yvan Bonnassieux
, Jean Eric Bourée

Research output: Contribution to journal › Article › peer-review

Abstract

Easily degradable organic photovoltaic (OPV) devices based on flexible polymer substrates require barrier films exhibiting extremely low permeation rates for water vapor. We report the barrier properties of hard/soft alternating layer structures where a soft PMMA layer is sandwiched between two hard SiN_x layers. The interfaces between the hard/soft layers hinder the propagation of pinholes from one single-layer to the other and thus have an effect on the overall barrier properties of the whole system. We focus our attention on the effect of increasing number of interfaces on the final barrier properties. The encapsulation barrier properties of these layers are assessed using the electrical calcium test. A minimum water vapor transmission rate (WVTR) of ~2×10^-4g/m²·day is reported for 7 hard/soft interfaces, which has also high potential for flexible barrier applications.

Original language	English
Pages (from-to)	429-432
Number of pages	4
Journal	Surface and Coatings Technology
Volume	254
DOIs	https://doi.org/10.1016/j.surfcoat.2014.06.059
Publication status	Published - 15 Sept 2014

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

ECR-PECVD
PMMA
Permeation barrier
Silicon nitride

Access to Document

10.1016/j.surfcoat.2014.06.059

Cite this

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title = "Interface effects on the moisture barrier properties of SiNx/PMMA/SiNx hybrid structure",

abstract = "Easily degradable organic photovoltaic (OPV) devices based on flexible polymer substrates require barrier films exhibiting extremely low permeation rates for water vapor. We report the barrier properties of hard/soft alternating layer structures where a soft PMMA layer is sandwiched between two hard SiNx layers. The interfaces between the hard/soft layers hinder the propagation of pinholes from one single-layer to the other and thus have an effect on the overall barrier properties of the whole system. We focus our attention on the effect of increasing number of interfaces on the final barrier properties. The encapsulation barrier properties of these layers are assessed using the electrical calcium test. A minimum water vapor transmission rate (WVTR) of \textasciitilde{}2×10-4g/m2·day is reported for 7 hard/soft interfaces, which has also high potential for flexible barrier applications.",

keywords = "ECR-PECVD, PMMA, Permeation barrier, Silicon nitride",

author = "Subimal Majee and Bernard Geffroy and Yvan Bonnassieux and Bour{\'e}e, \{Jean Eric\}",

year = "2014",

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doi = "10.1016/j.surfcoat.2014.06.059",

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journal = "Surface and Coatings Technology",

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T1 - Interface effects on the moisture barrier properties of SiNx/PMMA/SiNx hybrid structure

AU - Majee, Subimal

AU - Geffroy, Bernard

AU - Bonnassieux, Yvan

AU - Bourée, Jean Eric

PY - 2014/9/15

Y1 - 2014/9/15

N2 - Easily degradable organic photovoltaic (OPV) devices based on flexible polymer substrates require barrier films exhibiting extremely low permeation rates for water vapor. We report the barrier properties of hard/soft alternating layer structures where a soft PMMA layer is sandwiched between two hard SiNx layers. The interfaces between the hard/soft layers hinder the propagation of pinholes from one single-layer to the other and thus have an effect on the overall barrier properties of the whole system. We focus our attention on the effect of increasing number of interfaces on the final barrier properties. The encapsulation barrier properties of these layers are assessed using the electrical calcium test. A minimum water vapor transmission rate (WVTR) of ~2×10-4g/m2·day is reported for 7 hard/soft interfaces, which has also high potential for flexible barrier applications.

AB - Easily degradable organic photovoltaic (OPV) devices based on flexible polymer substrates require barrier films exhibiting extremely low permeation rates for water vapor. We report the barrier properties of hard/soft alternating layer structures where a soft PMMA layer is sandwiched between two hard SiNx layers. The interfaces between the hard/soft layers hinder the propagation of pinholes from one single-layer to the other and thus have an effect on the overall barrier properties of the whole system. We focus our attention on the effect of increasing number of interfaces on the final barrier properties. The encapsulation barrier properties of these layers are assessed using the electrical calcium test. A minimum water vapor transmission rate (WVTR) of ~2×10-4g/m2·day is reported for 7 hard/soft interfaces, which has also high potential for flexible barrier applications.

KW - ECR-PECVD

KW - PMMA

KW - Permeation barrier

KW - Silicon nitride

U2 - 10.1016/j.surfcoat.2014.06.059

DO - 10.1016/j.surfcoat.2014.06.059

M3 - Article

AN - SCOPUS:84905056415

SN - 0257-8972

VL - 254

SP - 429

EP - 432

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

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