Ion flux nonuniformities in large-area high-frequency capacitive discharges

A. Perret; P. Chabert; J. P. Booth; J. Jolly; J. Guillon; Ph Auvray

doi:10.1063/1.1592617

Ion flux nonuniformities in large-area high-frequency capacitive discharges

A. Perret
, P. Chabert
, J. P. Booth
, J. Jolly
, J. Guillon
, Ph Auvray

Research output: Contribution to journal › Article › peer-review

Abstract

The ion flux nonuniformities in large-area high-frequency capacitive discharges were studied. The ion flux uniformity measurements were performed in a large-area square capacitive discharge driven at frequencies between 13.56 MHz and 81.36 MHz and in argon gas at 150 mTorr. The results showed that, at higher rf power the maxima of the ion flux were observed at the edges, due either to the skin effect or to other edge effects.

Original language	English
Pages (from-to)	243-245
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	2
DOIs	https://doi.org/10.1063/1.1592617
Publication status	Published - 14 Jul 2003

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10.1063/1.1592617

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title = "Ion flux nonuniformities in large-area high-frequency capacitive discharges",

abstract = "The ion flux nonuniformities in large-area high-frequency capacitive discharges were studied. The ion flux uniformity measurements were performed in a large-area square capacitive discharge driven at frequencies between 13.56 MHz and 81.36 MHz and in argon gas at 150 mTorr. The results showed that, at higher rf power the maxima of the ion flux were observed at the edges, due either to the skin effect or to other edge effects.",

author = "A. Perret and P. Chabert and Booth, \{J. P.\} and J. Jolly and J. Guillon and Ph Auvray",

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T1 - Ion flux nonuniformities in large-area high-frequency capacitive discharges

AU - Perret, A.

AU - Chabert, P.

AU - Booth, J. P.

AU - Jolly, J.

AU - Guillon, J.

AU - Auvray, Ph

PY - 2003/7/14

Y1 - 2003/7/14

N2 - The ion flux nonuniformities in large-area high-frequency capacitive discharges were studied. The ion flux uniformity measurements were performed in a large-area square capacitive discharge driven at frequencies between 13.56 MHz and 81.36 MHz and in argon gas at 150 mTorr. The results showed that, at higher rf power the maxima of the ion flux were observed at the edges, due either to the skin effect or to other edge effects.

AB - The ion flux nonuniformities in large-area high-frequency capacitive discharges were studied. The ion flux uniformity measurements were performed in a large-area square capacitive discharge driven at frequencies between 13.56 MHz and 81.36 MHz and in argon gas at 150 mTorr. The results showed that, at higher rf power the maxima of the ion flux were observed at the edges, due either to the skin effect or to other edge effects.

UR - https://www.scopus.com/pages/publications/0042769375

U2 - 10.1063/1.1592617

DO - 10.1063/1.1592617

M3 - Article

AN - SCOPUS:0042769375

SN - 0003-6951

VL - 83

SP - 243

EP - 245

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 2

ER -

Ion flux nonuniformities in large-area high-frequency capacitive discharges

Abstract

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