Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications

Gŕgory Vincent; St́phane Collin; Nathalie Bardou; Jean Luc Pelouard; Riad Hadar

doi:10.1116/1.2998728

Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications

Gŕgory Vincent
, St́phane Collin
, Nathalie Bardou
, Jean Luc Pelouard
, Riad Hadar

Centre de Nanosciences et de Nanotechnologies
ONERA Office National d'Etudes et Recherches Aerospatiales

Research output: Contribution to journal › Article › peer-review

23 Citations (Scopus)

Abstract

The authors present a fabrication process of large-area (1.7×1.7 mm2) dielectric and metal-coated lamellar freestanding gratings structured at the micrometer scale. Both the stress management and the drying problems have been carefully optimized for the fabrication of drilled membranes. Transmission spectra measurements of freestanding gold-coated gratings demonstrate the achievement of high quality, accurately controlled optical filters in the midinfrared wavelength range.

Original language	English
Pages (from-to)	1852-1855
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	26
Issue number	6
DOIs	https://doi.org/10.1116/1.2998728
Publication status	Published - 11 Dec 2008
Externally published	Yes

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@article{7cf4cfe6bd9a4ace821f162b0731e62a,

title = "Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications",

abstract = "The authors present a fabrication process of large-area (1.7{\texttimes}1.7 mm2) dielectric and metal-coated lamellar freestanding gratings structured at the micrometer scale. Both the stress management and the drying problems have been carefully optimized for the fabrication of drilled membranes. Transmission spectra measurements of freestanding gold-coated gratings demonstrate the achievement of high quality, accurately controlled optical filters in the midinfrared wavelength range.",

author = "G{\'r}gory Vincent and S{\'t}phane Collin and Nathalie Bardou and Pelouard, \{Jean Luc\} and Riad Hadar",

year = "2008",

month = dec,

day = "11",

doi = "10.1116/1.2998728",

language = "English",

volume = "26",

pages = "1852--1855",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications

AU - Vincent, Gŕgory

AU - Collin, St́phane

AU - Bardou, Nathalie

AU - Pelouard, Jean Luc

AU - Hadar, Riad

PY - 2008/12/11

Y1 - 2008/12/11

N2 - The authors present a fabrication process of large-area (1.7×1.7 mm2) dielectric and metal-coated lamellar freestanding gratings structured at the micrometer scale. Both the stress management and the drying problems have been carefully optimized for the fabrication of drilled membranes. Transmission spectra measurements of freestanding gold-coated gratings demonstrate the achievement of high quality, accurately controlled optical filters in the midinfrared wavelength range.

AB - The authors present a fabrication process of large-area (1.7×1.7 mm2) dielectric and metal-coated lamellar freestanding gratings structured at the micrometer scale. Both the stress management and the drying problems have been carefully optimized for the fabrication of drilled membranes. Transmission spectra measurements of freestanding gold-coated gratings demonstrate the achievement of high quality, accurately controlled optical filters in the midinfrared wavelength range.

U2 - 10.1116/1.2998728

DO - 10.1116/1.2998728

M3 - Article

AN - SCOPUS:57249108252

SN - 1071-1023

VL - 26

SP - 1852

EP - 1855

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -

Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications

Abstract

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