Laser induced fluorescence detection of CF and CF2 radicals in a CF4/O2 plasma

J. P. Booth; G. Hancock; N. D. Perry

doi:10.1063/1.98214

Laser induced fluorescence detection of CF and CF₂ radicals in a CF₄/O₂ plasma

J. P. Booth
, G. Hancock
, N. D. Perry

University of Oxford

Research output: Contribution to journal › Article › peer-review

62 Citations (Scopus)

Abstract

Laser induced fluorescence has been used to detect ground-state CF and CF₂ radicals in a CF₄/O₂ plasma etching reactor. Measurements are reported of the spatial variation of CF₂ concentrations, of the CF radical rotational state distributions, and of the variation of both species with O₂ content of the plasma.

Original language	English
Pages (from-to)	318-319
Number of pages	2
Journal	Applied Physics Letters
Volume	50
Issue number	6
DOIs	https://doi.org/10.1063/1.98214
Publication status	Published - 1 Dec 1987
Externally published	Yes

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10.1063/1.98214

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title = "Laser induced fluorescence detection of CF and CF2 radicals in a CF4/O2 plasma",

abstract = "Laser induced fluorescence has been used to detect ground-state CF and CF2 radicals in a CF4/O2 plasma etching reactor. Measurements are reported of the spatial variation of CF2 concentrations, of the CF radical rotational state distributions, and of the variation of both species with O2 content of the plasma.",

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AU - Hancock, G.

AU - Perry, N. D.

PY - 1987/12/1

Y1 - 1987/12/1

N2 - Laser induced fluorescence has been used to detect ground-state CF and CF2 radicals in a CF4/O2 plasma etching reactor. Measurements are reported of the spatial variation of CF2 concentrations, of the CF radical rotational state distributions, and of the variation of both species with O2 content of the plasma.

AB - Laser induced fluorescence has been used to detect ground-state CF and CF2 radicals in a CF4/O2 plasma etching reactor. Measurements are reported of the spatial variation of CF2 concentrations, of the CF radical rotational state distributions, and of the variation of both species with O2 content of the plasma.

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DO - 10.1063/1.98214

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

ER -

Laser induced fluorescence detection of CF and CF2 radicals in a CF4/O2 plasma

Abstract

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Laser induced fluorescence detection of CF and CF₂ radicals in a CF₄/O₂ plasma