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Lateral porous alumina templates for planar organisation of carbon nanotubes and semiconductor nanowires

  • Samsung Electronics Co. Ltd.

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present some of our first experiments on the controlled growth of silicon nanowires and carbon nanotubes in lateral porous alumina templates synthesized by anodic oxidation of Al thin films. Under adapted chemical vapor deposition growth conditions, and using the vapor-solid-liquid mechanism, the pores of the lateral membranes can be partially filled with silicon nanowires or carbon nanotubes, yielding a composite thin film of parallel-organized nano-objects. Such composite thin films can be further tailored and shaped by classical microelectronic-type tools and processes, in order to fabricate electronic devices.

Original languageEnglish
Title of host publication2009 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT
PublisherElectrochemical Society Inc.
Pages305-316
Number of pages12
Edition1
ISBN (Electronic)9781607680857
ISBN (Print)9781607682646
DOIs
Publication statusPublished - 1 Jan 2009
Event2nd International Conference on Semiconductor Technology for Ultra Large Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT II - Xian, China
Duration: 5 Jul 200910 Jul 2009

Publication series

NameECS Transactions
Number1
Volume22
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

Conference2nd International Conference on Semiconductor Technology for Ultra Large Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT II
Country/TerritoryChina
CityXian
Period5/07/0910/07/09

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