Low temperature plasma deposition of microcrystalline silicon thin films for active matrix displays: Opportunities and challenges

Pere Roca I Cabarrocas; Alexey Abramov; Nans Pham; Yassine Djeridane; Oumkelthoum Moustapha; Yvan Bonnassieux; Girotra Kunal; Chen Hong; Park SeungKyu; Park Kyongtae; Jong Moo Huh; Choi Joonhoo; Kim ChiWoo; Lee JinSeok; H. Souk Jun

Low temperature plasma deposition of microcrystalline silicon thin films for active matrix displays: Opportunities and challenges

Pere Roca I Cabarrocas
, Alexey Abramov
, Nans Pham
, Yassine Djeridane
, Oumkelthoum Moustapha
, Yvan Bonnassieux
, Girotra Kunal
, Chen Hong
, Park SeungKyu
, Park Kyongtae
, Jong Moo Huh
, Choi Joonhoo
, Kim ChiWoo
, Lee JinSeok
, H. Souk Jun

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	107-108
Number of pages	2
Journal	Proceedings of International Meeting on Information Display
Volume	8
Publication status	Published - 1 Dec 2008
Event	8th International Meeting on Information Display - International Display Manufacturing Conference 2008 and Asia Display 2008, IMID/IDMC/ASIA DISPLAY 2008 - Ilsan, Korea, Republic of Duration: 13 Oct 2008 → 17 Oct 2008

Cite this

Roca I Cabarrocas, P., Abramov, A., Pham, N., Djeridane, Y., Moustapha, O., Bonnassieux, Y., Kunal, G., Hong, C., SeungKyu, P., Kyongtae, P., Huh, J. M., Joonhoo, C., ChiWoo, K., JinSeok, L., & Jun, H. S. (2008). Low temperature plasma deposition of microcrystalline silicon thin films for active matrix displays: Opportunities and challenges. Proceedings of International Meeting on Information Display, 8, 107-108.

@article{5f53fd33c10b4b2c947f5ec0910ec4cb,

title = "Low temperature plasma deposition of microcrystalline silicon thin films for active matrix displays: Opportunities and challenges",

author = "\{Roca I Cabarrocas\}, Pere and Alexey Abramov and Nans Pham and Yassine Djeridane and Oumkelthoum Moustapha and Yvan Bonnassieux and Girotra Kunal and Chen Hong and Park SeungKyu and Park Kyongtae and Huh, \{Jong Moo\} and Choi Joonhoo and Kim ChiWoo and Lee JinSeok and Jun, \{H. Souk\}",

year = "2008",

month = dec,

day = "1",

language = "English",

volume = "8",

pages = "107--108",

journal = "Proceedings of International Meeting on Information Display",

issn = "1738-7558",

note = "8th International Meeting on Information Display - International Display Manufacturing Conference 2008 and Asia Display 2008, IMID/IDMC/ASIA DISPLAY 2008 ; Conference date: 13-10-2008 Through 17-10-2008",

}

Roca I Cabarrocas, P, Abramov, A, Pham, N, Djeridane, Y, Moustapha, O, Bonnassieux, Y, Kunal, G, Hong, C, SeungKyu, P, Kyongtae, P, Huh, JM, Joonhoo, C, ChiWoo, K, JinSeok, L & Jun, HS 2008, 'Low temperature plasma deposition of microcrystalline silicon thin films for active matrix displays: Opportunities and challenges', Proceedings of International Meeting on Information Display, vol. 8, pp. 107-108.

TY - JOUR

T1 - Low temperature plasma deposition of microcrystalline silicon thin films for active matrix displays

T2 - 8th International Meeting on Information Display - International Display Manufacturing Conference 2008 and Asia Display 2008, IMID/IDMC/ASIA DISPLAY 2008

AU - Roca I Cabarrocas, Pere

AU - Abramov, Alexey

AU - Pham, Nans

AU - Djeridane, Yassine

AU - Moustapha, Oumkelthoum

AU - Bonnassieux, Yvan

AU - Kunal, Girotra

AU - Hong, Chen

AU - SeungKyu, Park

AU - Kyongtae, Park

AU - Huh, Jong Moo

AU - Joonhoo, Choi

AU - ChiWoo, Kim

AU - JinSeok, Lee

AU - Jun, H. Souk

PY - 2008/12/1

Y1 - 2008/12/1

UR - https://www.scopus.com/pages/publications/65649135403

M3 - Conference article

AN - SCOPUS:65649135403

SN - 1738-7558

VL - 8

SP - 107

EP - 108

JO - Proceedings of International Meeting on Information Display

JF - Proceedings of International Meeting on Information Display

Y2 - 13 October 2008 through 17 October 2008

ER -

Low temperature plasma deposition of microcrystalline silicon thin films for active matrix displays: Opportunities and challenges

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